Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution

PAJDAROVA, A.D., KOZÁK, T., HUBIČKA, Z., ČADA, M., MAREŠ, P., ČAPEK, J. Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution. Plasma Sources Science & Technology. 2020, 29(8), 1-11), 085016. ISSN 0963-0252. E-ISSN 1361-6595. Available: doi: 10.1088/1361-6595/aba773.