Comparison of the surface texture of laser-machined fused silica by wavelengths of 1030 nm, 515 nm, and 257 nm

0584175 - ÚPT 2024 DE eng A - Abstract
Novotný, Jan - Mrňa, Libor
Comparison of the surface texture of laser-machined fused silica by wavelengths of 1030 nm, 515 nm, and 257 nm.
Laser Symposium & ISAM 2023. Dresden: Fraunhofer Institute for Material and Beam Technology IWS, 2023. s. 50. ISBN N.
[Laser Symposium /12./ and International Symposium Additive Manufacturing (ISAM) /5./ 2023. 29.11.2023-01.12.2023, online]
Grant - others:AV ČR(CZ) StrategieAV21/17
Program: StrategieAV
Institutional support: RVO:68081731
Keywords : Ultrafast laser * laser ablation * glass * defects
OECD category: Optics (including laser optics and quantum optics)

The quality of ultrafast laser-machined surfaces depends on several process parameters. In the experiment, the parameters window that yields the lowest roughness and lowest number of defects were found. The most important parameter after laser fluence is scan line overlap, which has the biggest impact on residual heat dissipation and related stresses in the specimen. The second harmonic wavelength yielded 10 % better surface roughness, lower waviness, and a lower number of defects on the surface and edges of the processed area.
Permanent Link: https://hdl.handle.net/11104/0352160