Silicon nanocrystal synthesis with the atmospheric plasma source HelixJet

0570403 - FZÚ 2024 RIV DE eng J - Journal Article
Dworschak, M. - Kohlmann, N. - Matějka, Filip - Galář, Pavel - Kienle, L. - Schäfer, J. - Benedikt, J.
Silicon nanocrystal synthesis with the atmospheric plasma source HelixJet.
Plasma Processes and Polymers. Roč. 20, č. 2 (2023), č. článku 2200129. ISSN 1612-8850. E-ISSN 1612-8869
Institutional support: RVO:68378271
Keywords : atmospheric pressure plasmas * silane * silicon nanocrystals * photoluminescence
OECD category: Nano-materials (production and properties)
Impact factor: 3.5, year: 2022
Method of publishing: Open access

The HelixJet, a plasma source operating under atmospheric pressure with RF power, was used for the synthesis of silicon nanoparticles (Si-NPs) in the context of relevance in nanomedicine, sensor technology and nanotechnology. The HelixJet was operated with a variety of He/Ar/H2/SiH4 gas mixtures to characterize the Si-NPs in regards to their size, crystallinity, structure and photoluminescence. Admixture of H2 alongside high RF powers led to the formation of crystalline nanoparticles with a strong photoluminescence intensity, where the photoluminescence properties as well as the nanocrystal synthesis yield were tunable by adjustment of the synthesis parameters. In addition, the experiments conducted in this study resulted in a design improvement of the HelixJet plasma source that extends the stability of the operating range.
Permanent Link: https://hdl.handle.net/11104/0341712