Characterizing optical phase-change materials with spectroscopic ellipsometry and polarimetry

0568882 - FZÚ 2023 RIV CH eng J - Journal Article
Gutiérrez, Y. - Espinoza Herrera, Shirly J. - Zahradník, Martin - Khakurel, Krishna - Resl, J. - Cobet, C. - Hingerl, K. - Duwe, M. - Thiesen, P. - Losurdo, M.
Characterizing optical phase-change materials with spectroscopic ellipsometry and polarimetry.
Thin Solid Films. Roč. 763, DEC (2022), č. článku 139580. ISSN 0040-6090. E-ISSN 1879-2731
R&D Projects: GA MŠMT EF16_019/0000789; GA MŠMT EF15_003/0000447; GA MŠMT(CZ) LM2018141
Grant - others:OP VVV - ADONIS(XE) CZ.02.1.01/0.0/0.0/16_019/0000789; OP VVV - ELIBIO(XE) CZ.02.1.01/0.0/0.0/15_003/0000447
Institutional support: RVO:68378271
Keywords : ellipsometry * polarimetry * phase -change materials
OECD category: Particles and field physics
Impact factor: 2.1, year: 2022
Method of publishing: Open access

This paper discusses the fundamentals, applications, potential and limitations of polarized light reflection techniques for the characterization of phase-change materials (PCMs). These techniques include spectroscopic ellipsometry, time-resolved ellipsometry and imaging ellipsometry as well as polarimetry. We explore the ca-pabilities of spectroscopic ellipsometry in the determination of the extinction coefficient of PCMs and the ca-pabilities of imaging ellipsometry to characterize PCMs. We show that ellipsometry is capable of more than the determination of thickness and optical properties, and it can be exploited to gain information about crystalli-zation/amorphization kinetics and mapping anisotropies.
Permanent Link: https://hdl.handle.net/11104/0340160