Diamond-based RF MEMS microheaters for insects behavior monitoring

0559039 - FZÚ 2023 RIV SK eng C - Conference Paper (international conference)
Vanko, G. - Andok, R. - Tomáška, M. - Wu, S.-R. - Vojs, M. - Hudec, B. - Marton, M. - Řeháček, V. - Kromka, Alexander - Izsák, T. - Chen, Y.-H. - Tsai, H.-Y.
Diamond-based RF MEMS microheaters for insects behavior monitoring.
Proceedings of ADEPT - ADEPT 2022. Žilina: University of Žilina, 2022 - (Feiler, M.; Ziman, M.; Kováčová, S.; Kováč, jr., J.), s. 145-148. ISBN 978-80-554-1884-1.
[10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022. Tatranská Lomnica (SK), 20.06.2022-24.06.2022]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : MEMS * drosophila * LC micro-heater * WBG materials * resonance circuit
OECD category: Materials engineering

In this paper we describe a wireless micro-heater that can be installed on the back of the drosophila with the aim to stimulate and monitor their behavior. We propose a suitable technological process that allows the fabrication of a micro-heater based on a diamond film and a resonant LC circuit fabricated by planar technology small enough to be carried by a tiny insect. We show here temperature dependent DC resistance change of the proposed inductors, as well as measured and simulated transfer characteristics for the determination of the resonant frequency of the fabricated LC resonant circuits of the proposed micro-heater.
Permanent Link: https://hdl.handle.net/11104/0332454