Beam shaping and probe characterization in the scanning electron microscope

0543063 - ÚPT 2022 RIV NL eng J - Journal Article
Řiháček, Tomáš - Horák, M. - Schachinger, T. - Mika, Filip - Matějka, Milan - Krátký, Stanislav - Fořt, Tomáš - Radlička, Tomáš - Johnson, C. W. - Novák, L. - Seďa, B. - McMorran, B.J. - Müllerová, Ilona
Beam shaping and probe characterization in the scanning electron microscope.
Ultramicroscopy. Roč. 225, June (2021), č. článku 113268. ISSN 0304-3991. E-ISSN 1879-2723
R&D Projects: GA TA ČR(CZ) TN01000008
Institutional support: RVO:68081731
Keywords : Electron diffraction * SEM * Electron beam structuring * Spot shape measurement * Electron vortex beam
OECD category: Particles and field physics
Impact factor: 2.994, year: 2021
Method of publishing: Open access
https://www.sciencedirect.com/science/article/pii/S0304399121000589

Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
Permanent Link: http://hdl.handle.net/11104/0320365