Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

0538507 - FZÚ 2021 RIV US eng J - Journal Article
Espinoza Herrera, Shirly J. - Samparisi, F. - Frassetto, F. - Richter, Steffen - Rebarz, Mateusz - Finke, Ondřej - Albrecht, Martin - Jurkovič, Matěj - Hort, Ondřej - Fabris, N. - Zymaková, Anna - Mai, Dong-Du - Antipenkov, Roman - Nejdl, Jaroslav - Poletto, L. - Andreasson, Jakob
Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines.
Journal of Vacuum Science and Technology. Part B. Nanotechnology & Microelectronics. Roč. 38, č. 2 (2020), s. 1-5, č. článku 024005. ISSN 2166-2746. E-ISSN 2166-2754
R&D Projects: GA MŠMT EF16_019/0000789; GA MŠMT EF15_003/0000447; GA MŠMT LQ1606
Grant - others:OP VVV - ADONIS(XE) CZ.02.1.01/0.0/0.0/16_019/0000789; OP VVV - ELIBIO(XE) CZ.02.1.01/0.0/0.0/15_003/0000447
Research Infrastructure: ELI Beamlines III - 90141
Institutional support: RVO:68378271
Keywords : VUV ellipsometry * VUV polarizer * HHG * XUV ellipsometry
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 1.416, year: 2020
Method of publishing: Open access

In this paper, the authors present the characterization experiments of a 20fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer's Malus curve was obtained, the total acquisition time for each point of the curve was 30s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12mJ, 1kHz, 20fs, in-house-developed laser and detected by a back-illuminated charge-coupled device.
Permanent Link: http://hdl.handle.net/11104/0316302