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Tetrafluoromethane (CF4) decomposition using argon/water plasma torch
- 1.0504981 - ÚFP 2020 RIV SK eng C - Conference Paper (international conference)
Hlína, Michal - Živný, Oldřich - Mašláni, Alan - Serov, Anton - Hrabovský, Milan
Tetrafluoromethane (CF4) decomposition using argon/water plasma torch.
SAPP XXII: Book of Contributed Papers. Bratislava: Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, 2018, s. 350-353. ISBN 978-80-8147-089-9.
[22nd Symposium on Applications of Plasma Processes (SAPP XXII). Štrbské Pleso (SK), 18.01.2019-24.01.2019]
R&D Projects: GA TA ČR TE02000011
Institutional support: RVO:61389021
Keywords : plasma * decomposition * tetrafluoromethane
OECD category: Fluids and plasma physics (including surface physics)
High enthalpy argon/water plasma was used for the decomposition of tetrafluoromethane. The effects of the power of the torch, the addition of H2 and the dilution of treated gas by N2 were investigated. The process of decomposition occurred and reached high values for all conditions.
Permanent Link: http://hdl.handle.net/11104/0296513
Number of the records: 1