Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens

0352431 - ÚPT 2011 SG eng A - Abstract
Konvalina, Ivo - Müllerová, Ilona
Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens.
Eighth International Conference on Charged Particle Optics CPO-8. Singapore: National University of Singapore, 2010. s. 158-159.
[CPO /8./ International Conference on Charged Particle Optics. 12.07.2010-16.07.2010, Singapore]
R&D Projects: GA ČR GAP102/10/1410; GA AV ČR IAA100650902
Institutional research plan: CEZ:AV0Z20650511
Keywords : cathode lens * photo-emission electron microscopy * low energy electron microscopy * scanning electron microscopy * EOD
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Cathode lens (CL) is an electron optical element commonly used in the photo-emission electron microscopy (PEEM), low energy electron microscopy (LEEM) and last but not least in the scanning electron microscopy (SEM). Lenc and Müllerová studied the basic optical parameters of the CL alone as well as in combination with a magnetic focusing lens, and derived approximate analytical expressions for the axial aberration coefficients for both cases. For the combination of lenses, the sequential arrangement of electrostatic and magnetic fields was considered. Several authors have claimed the aberration coefficients smaller for overlapped fields of the lenses under combination.
Permanent Link: http://hdl.handle.net/11104/0191938