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Plasma polymer films rf sputtered from PTFE under various argon pressures
- 1.0026589 - FZÚ 2006 RIV GB eng J - Journal Article
Stelmashuk, Vitaliy - Biederman, H. - Slavinská, D. - Zemek, Josef - Trchová, Miroslava
Plasma polymer films rf sputtered from PTFE under various argon pressures.
[Plasmaticky nanášené vrstvy PTFE při různém tlaku argonu.]
Vacuum. Roč. 77, č. 2 (2005), s. 131-137. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA MŠMT(CZ) OC 527.10; GA MŠMT(CZ) OC 527.90
Grant - others:EUREKAΣ2080(XE) OE57
Institutional research plan: CEZ:AV0Z10100521; CEZ:AV0Z20430508
Keywords : RF sputtering * PTFE * fluorcarbon plasma polymers * thin film * teflon * deposition
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.909, year: 2005
Fluorcarbon plasma polymer films were prepared by sputering of PTFE characterized by atomic force microscopy (AFM), x-ray photoelectron spectroscopy (XPS) and infrared (IR) spectroscopy.
Plasmaticky nanášené fluorouhlíkaté vrstvy byly připraveny naprašováním a charakterizovány metodami AFM, XPS a IR.
Permanent Link: http://hdl.handle.net/11104/0116815
Number of the records: 1