Počet záznamů: 1

Mechanical properties of Al thin film measured by two different methods

  1. 1.
    0368997 - UFM-A 2012 RIV SK eng J - Článek v odborném periodiku
    Kuběna, Ivo - Kruml, Tomáš
    Mechanical properties of Al thin film measured by two different methods.
    Acta Metallurgica Slovaca. - (Longauerová, M.). Roč. 17, č. 3 (2011), s. 163-168 ISSN 1338-1156
    Výzkumný záměr: CEZ:AV0Z20410507
    Klíčová slova: thin films * focused ion beam * aluminium * nanoindentation
    Kód oboru RIV: JJ - Ostatní materiály

    Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 micrometers and their diameter about 1,3 micrometers. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated
    Trvalý link: http://hdl.handle.net/11104/0203178