Počet záznamů: 1

Scanning transmission low-energy electron microscopy

  1. 1.
    0367292 - UPT-D 2012 RIV US eng J - Článek v odborném periodiku
    Müllerová, Ilona - Hovorka, Miloš - Konvalina, Ivo - Unčovský, M. - Frank, Luděk
    Scanning transmission low-energy electron microscopy.
    IBM Journal of Research and Development. Roč. 55, č. 4 (2011), 2:1-6 ISSN 0018-8646
    Grant CEP: GA AV ČR IAA100650902; GA MŠk ED0017/01/01
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: TEM * STEM * SEM
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Impakt faktor: 0.723, rok: 2011

    We discuss an extension to the transmission mode of the cathode-lens-equipped scanning electron microscope, enabling operation down to the lowest energies of electrons. Penetration of electrons through free-standing ultrathin films is examined along the full energy scale, and the contribution of the secondary electrons (SEs), released near the bottom surface of the sample, is shown, enhancing the apparent transmissivity of the sample to more than 100%. Provisional filtering off of the SEs, providing the dark-field signal of forward-scattered electrons, was made using an annular 3-D adjustable detector inserted below the sample. Demonstration experiments were performed on the graphene flakes and on a 3-nm-thick carbon film. Electron penetrability at the lowest energies was measured on the graphene sample.
    Trvalý link: http://hdl.handle.net/11104/0202028