Počet záznamů: 1

FIB Induced Damage Examined with the Low Energy SEM

  1. 1.
    0365942 - UPT-D 2012 RIV JP eng J - Článek v odborném periodiku
    Mikmeková, Šárka - Matsuda, K. - Watanabe, K. - Ikeno, S. - Müllerová, Ilona - Frank, Luděk
    FIB Induced Damage Examined with the Low Energy SEM.
    Materials Transactions. Roč. 52, č. 3 (2011), s. 292-296 ISSN 1345-9678
    Grant CEP: GA MŠk OE08012
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: scanning low energy electron microscopy * focused ion beam * beam induced damage * sputtering
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Impakt faktor: 0.699, rok: 2011

    The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga(+) ions at various energies (10, 20, 30, and 40 keV) and incident angles (0 degrees, 30 degrees, 45 degrees, and 60 degrees). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.
    Trvalý link: http://hdl.handle.net/11104/0201068