Počet záznamů: 1

Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power

  1. 1.
    0365318 - UJF-V 2013 RIV CH eng J - Článek v odborném periodiku
    Kontarova, S. - Peřina, Vratislav - Čech, V.
    Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power.
    Surface and Coatings Technology. Roč. 205, Suppl.2 (2011), s. 451-454 ISSN 0257-8972
    Výzkumný záměr: CEZ:AV0Z10480505
    Klíčová slova: Plasma polymerization * Multilayer * Ellipsometry * Refractive index
    Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
    Impakt faktor: 1.867, rok: 2011

    Hydrogenated amorphous carbon-silicon alloys were prepared from tetravinylsilane monomer using plasma-enhanced chemical vapor deposition at different powers (10-70 W). The optical properties of the plasma polymer films were analyzed by spectroscopic ellipsometry in the range 250-830 nm. The refractive index of pp-TVS films can be controlled by RF power, which for a wavelength of 633 nm ranged from 1.69 (10 W) to 2.08 (70 W).
    Trvalý link: http://hdl.handle.net/11104/0200586