Počet záznamů: 1

Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation

  1. 1.
    0364639 - FZU-D 2012 RIV CH eng J - Článek v odborném periodiku
    Kocourek, Tomáš - Růžek, Michal - Landa, Michal - Jelínek, Miroslav - Mikšovský, Jan - Kopeček, Jaromír
    Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation.
    Surface and Coatings Technology. Roč. 205, č. 2 (2011), S67-S70 ISSN 0257-8972
    Grant CEP: GA ČR(CZ) GA101/09/0702
    Výzkumný záměr: CEZ:AV0Z10100522; CEZ:AV0Z20760514
    Klíčová slova: RUS-resonant ultrasound spectroscopy * PLD * diamond-like carbon * elastic properties * AFM nanoindentation
    Kód oboru RIV: BH - Optika, masery a lasery
    Impakt faktor: 1.867, rok: 2011

    Elastic properties of diamond-like carbon (DLC) layers with gradient carbon–silicon interlayer were studied by resonant ultrasound spectroscopy (RUS) and standard nano-indentation technique. The DLC layers were prepared by pulsed laser deposition on SiC/Si substrates. The RUS method is based on modal analysis of the specimen vibration. The resonant frequency shifts caused by the layer are for the evaluation of the dynamic inplane elastic properties of the deposited DLC. The results were compared with the quasi-statical quantities - Young's modulus and hardness, obtained by nanoindentation using the AFM tip.
    Trvalý link: http://hdl.handle.net/11104/0200072