Počet záznamů: 1
Conductive gas sensors prepared using PLD
- 1.0363985 - FZÚ 2012 RIV NL eng C - Konferenční příspěvek (zahraniční konf.)
Jelínek, Miroslav - Myslík, V. - Vrňata, M. - Fryček, R. - Fitl, P. - Vysloužil, F. - Kocourek, Tomáš
Conductive gas sensors prepared using PLD.
Nanotechnological Basis for Advanced Sensors. Dodrecht: Springer, 2010 - (Reithmaier, J.; Paunovic, P.; Kulisch, W.; Popov, C.; Petkov, P.), s. 390-399. NATO Science for Peace and Security Series B-Physics and Biophysics. ISBN 978-94-007-0902-7.
[NATO-Advanced-Study-Institute Conference on Nanotechnological Basis for Advanced Sensor. Sozopol (BG), 30.05.2010-11.06.2010]
Výzkumný záměr: CEZ:AV0Z10100520
Klíčová slova: PLD * hybrid PLD * MAPLE * gas sensor * thin film sensor
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
http://dx.doi.org/10.1007/978-94-007-0903-4_40
This contribution deals with conductive thin film gas sensors fabricated using laser technology. The principle of pulsed laser deposition (PLD) technology is explained. The hybrid PLD systems, based on combination of PLD and magnetron, PLD and RF discharges and PLD from two laser targets, are also presented. Growing layers can be modified by ion beam. Organic films can be grown using cryogenic MAPLE technology. Nanocrystalline and testing of layer properties of gas sensors are given.
Trvalý link: http://hdl.handle.net/11104/0199590
Počet záznamů: 1