Počet záznamů: 1

Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

  1. 1.
    0362870 - UFM-A 2012 RIV CH eng J - Článek v odborném periodiku
    Vašina, P. - Souček, P. - Schmidtová, T. - Eliáš, M. - Buršíková, V. - Jílek, M. - Jílek Jr., M. - Schäfer, C. - Buršík, Jiří
    Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering.
    Surface and Coatings Technology. Roč. 205, Suppl. 2 (2011), S53-S56 ISSN 0257-8972
    Výzkumný záměr: CEZ:AV0Z20410507
    Klíčová slova: composite * mechanical properties * magnetron
    Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
    Impakt faktor: 1.867, rok: 2011

    Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H)shows high hardness and Young’s modulus together with low friction coefficient. In this paper, we report on the preparation of well adherent (nc-TiC/a-C:H)coatings - 5mm thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young’s modulus of this coatings are 43 Gpa and 380 Gpa, respectively. The mechanical properties – hardness and Young’s modulus – measured from the coatings top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young’s modulus, composition and morphology.
    Trvalý link: http://hdl.handle.net/11104/0199051