Počet záznamů: 1

Investigation of the mechanical properties of thin films by bulge test

  1. 1.
    0353858 - UFM-A 2011 RIV CH eng J - Článek v odborném periodiku
    Hémel, A. - Jacques, A. - Schenk, T. - Kruml, Tomáš
    Investigation of the mechanical properties of thin films by bulge test.
    Solid State Phenomena. 156-158, - (2010), s. 477-482 ISSN 1012-0394.
    [GADEST 2009. Berlin, 26.09.2009-2.10.2009]
    Výzkumný záměr: CEZ:AV0Z20410507
    Klíčová slova: thin films * mechanical properties * bulge test
    Kód oboru RIV: JJ - Ostatní materiály

    A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data.
    Trvalý link: http://hdl.handle.net/11104/0192987