Počet záznamů: 1

Effect of Hydrogen on the Properties of Amorphous Carbon Nitride Films

  1. 1.
    0352948 - UPT-D 2011 RIV CN eng C - Konferenční příspěvek (zahraniční konf.)
    Mikmeková, Eliška - Urbánek, Michal - Fořt, Tomáš - Di Mundo, R.
    Effect of Hydrogen on the Properties of Amorphous Carbon Nitride Films.
    2010 International Conference on Manufacturing Science and Technology (ICMST 2010). Chengdu: Institute of Electrical and Electronics Engineers, Inc, 2010, s. 291-295. ISBN 978-1-4244-8759-2.
    [International Conference on Manufacturing Science and Technology - ICMST 2010. Kuala Lumpur (MY), 26.11.2010-28.11.2010]
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: hydrogenated alfa-CNx films * ressidal stress * r. f. magnetron sputtering * SLEEM * XPS * TDMS * AFM
    Kód oboru RIV: JI - Kompozitní materiály

    rf - The effect of hydrogen on the properties of amorphous carbon nitride films deposited onto Si substrates by magnetron sputtering device has been studied.
    Trvalý link: http://hdl.handle.net/11104/0192321