Počet záznamů: 1

Use of electronics product definition for the development of differentially pumped chamber

  1. 1.
    0352595 - UPT-D 2011 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
    Maxa, J. - Neděla, Vilém
    Use of electronics product definition for the development of differentially pumped chamber.
    EDS'10 - Electronic Devices and Systems IMAPS CS International Conference 2010 - Proceedings. Brno: Vysoké učení technické v Brně, 2010, s. 215-223. ISBN 978-80-214-4138-5.
    [EDS '10 - Electronic Devices and Systems IMAPS CS International Conference. Brno (CZ), 01.09.2010-02.09.2010]
    Grant CEP: GA ČR GAP102/10/1410
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: EREM * CAx * SolidWorks * Cosmos * FEI
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

    Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. The article analyses 3nd compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.
    Trvalý link: http://hdl.handle.net/11104/0192070