Počet záznamů: 1

Interferometer controlled positioning for nanometrology

  1. 1.
    0352199 - UPT-D 2011 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
    Lazar, Josef - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Šerý, Mojmír - Klapetek, P.
    Interferometer controlled positioning for nanometrology.
    2nd International Conference NANOCON 2010. Ostrava: Tanger s.r.o, 2010, s. 287-291. ISBN 978-80-87294-19-2.
    [NANOCON 2010. International Conference /2./. Olomouc (CZ), 12.10.2010-14.10.2010]
    Grant CEP: GA MŠk(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: nanometrology * interferometry * local probe microscopy * nanopositioning
    Kód oboru RIV: BH - Optika, masery a lasery

    We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom.
    Trvalý link: http://hdl.handle.net/11104/0191768