3D characterization of material structure using scanning electron microscopy (SEM) and focused ion beam (FIB)

0351718 - FZÚ 2011 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Hradilová, Monika - Jäger, Aleš - Lejček, Pavel
3D characterization of material structure using scanning electron microscopy (SEM) and focused ion beam (FIB).
Metal 2010 - 19th international conference on metallurgy and materials. Ostrava: Tanger s.r.o, 2010, s. 152-153. ISBN 978-80-87294-15-4.
[Metal 2010. Rožnov pod Radhoštěm (CZ), 18.05.2010-20.05.2010]
Výzkumný záměr: CEZ:AV0Z10100520
Klíčová slova: scanning electron microscopy * focused ion beam * 3D characterization
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

The possibilities of analysis can be enhanced by utilizing focused ion beam (FIB). The FIB instrument allows revealing the structure in the third dimension by controlled and precise milling of the material. In combination with electron beam and suitable detector is possible to describe crystallography (EBSD) or chemical composition (EDS) etc. in three dimensions (3D). Thus, it is feasible to define real size, shape and distribution of microstructure features such as grains, grain boundaries, phases, precipitates and micropores.
Trvalý link: http://hdl.handle.net/11104/0191410