Počet záznamů: 1

Transmission mode in scanning low enery electron microscope

  1. 1.
    0350667 - UPT-D 2011 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
    Müllerová, Ilona - Hovorka, Miloš - Frank, Luděk
    Transmission mode in scanning low enery electron microscope.
    Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 41-42. ISBN 978-80-254-6842-5.
    [International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
    Grant CEP: GA AV ČR IAA100650902
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: cathode lens * SEM * transmitted electron mode
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

    We incorporated the cathode lens (CL) principle, well known from the emission microscope, to the SEM in order to operate at very low landing energies. The primary beam electrons of several keV are decelerated to nearly zero energy of landing on the specimen negatively biased to high potential. Reflected electrons are collected on a grounded detector situated above the sample but the same can be done below the sample of a fair transparency for electrons. High collection efficiency and high amplification of both detectors is secured thanks to the cathode lens field. We use a scintillation detector for the reflected mode and a semiconductor structure for the transmitted electron (TE) mode. In this arrangement resolution of few nm is obtainable across the full energy range.
    Trvalý link: http://hdl.handle.net/11104/0190607