Počet záznamů: 1

Comparison of techniques for diffraction grating topography analysis

  1. 1.
    0350662 - UPT-D 2011 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
    Matějka, Milan - Rek, Antonín - Mika, Filip - Fořt, Tomáš - Matějková, Jiřina
    Comparison of techniques for diffraction grating topography analysis.
    Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 29-32. ISBN 978-80-254-6842-5.
    [International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: Atomic Force Microscopy * AEM * Scanning Electron Microscopy * SEM * topography imaging
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

    There are a wide range of analytical techniques which may be used for surface structure characterization. For high resolution surface investigations, two commonly used techniques are Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Both techniques are capable resolve surface structure down to the nanometer in scale. However the mechanism of topography imaging and type of information acquired is different.
    Trvalý link: http://hdl.handle.net/11104/0190602