Počet záznamů: 1

Modification of the Schottky Fe ZrO/W electron emitter

  1. 1.
    0350657 - UPT-D 2011 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
    Matějka, František - Horáček, Miroslav - Kolařík, Vladimír - Král, Stanislav
    Modification of the Schottky Fe ZrO/W electron emitter.
    Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 13-14. ISBN 978-80-254-6842-5.
    [International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
    Grant CEP: GA AV ČR IAA100650803; GA MPO FR-TI1/576; GA MŠk ED0017/01/01
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: Schottky electron emitter * e-beam writing system * point projection
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

    A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based on the principle of point projection. We studied the influence of both the surface treatment and the change of the shape of the tip on the emission characteristics.
    Trvalý link: http://hdl.handle.net/11104/0190597