Počet záznamů: 1

Spatial coherence profilometry on tilted surfaces

  1. 1.
    0340740 - FZU-D 2010 RIV US eng J - Článek v odborném periodiku
    Pavlíček, Pavel - Halouzka, M. - Duan, Z. - Takeda, M.
    Spatial coherence profilometry on tilted surfaces.
    Applied Optics. Roč. 48, č. 34 (2009), H40-H47 ISSN 0003-6935
    Grant CEP: GA MŠk(CZ) 1M06002
    Výzkumný záměr: CEZ:AV0Z10100522
    Klíčová slova: tilted surface * spatial coherence profilometry * spatial coherence * measurement error * shape measurement
    Kód oboru RIV: BH - Optika, masery a lasery
    Impakt faktor: 1.410, rok: 2009

    The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light interferometry.
    Trvalý link: http://hdl.handle.net/11104/0183922