Počet záznamů: 1

Green Light Interferometry for Metrological SPM Positioning

  1. 1.
    0335098 - UPT-D 2010 RIV JP eng C - Konferenční příspěvek (zahraniční konf.)
    Lazar, Josef - Klapetek, P. - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Šerý, Mojmír
    Green Light Interferometry for Metrological SPM Positioning.
    MOC'09 - 15th Microoptics Conference. Tokyo: Microoptics Group (OSJ/JSAP), 2009, s. 232-233. ISBN 978-4-86348-037-7.
    [MOC'09 - Microoptics Conference /15./. Tokyo (JP), 25.10.2009-28.10.2009]
    Grant CEP: GA MŠk(CZ) LC06007; GA MŠk 2C06012; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/09/1276; GA ČR GA102/07/1179
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: scanning probe microscopy * Nd:YAG laser * green light interferometry
    Kód oboru RIV: BH - Optika, masery a lasery

    We present an arrangement for dimensional metrology of nanostructures based on various techniques of scanning probe microscopy (SPM) combined with a precision positioning of a sample. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. Traceability of the position monitoring and control of the scanning stage is ensured by full six axes interferometric displacement measurements. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine.
    Trvalý link: http://hdl.handle.net/11104/0179667