Počet záznamů: 1

Novel instrumentation for interferometric nanoscale comparator

  1. 1.
    0335088 - UPT-D 2010 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
    Čížek, Martin - Buchta, Zdeněk - Mikel, Břetislav - Lazar, Josef - Číp, Ondřej
    Novel instrumentation for interferometric nanoscale comparator.
    Optical Measurement Systems for Industrial Inspection VI. (Proceedings of SPIE Vol. 7389). Bellingham: SPIE, 2009, 73982Y: 1-7. ISBN 978-0-8194-7672-2. ISSN 0277-786X.
    [Optical Measurement Systems for Industrial Inspection /6./. Munich (DE), 14.06.2009-18.06.2009]
    Grant CEP: GA ČR GA102/09/1276; GA MŠk(CZ) LC06007; GA MŠk 2C06012; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/07/1179; GA ČR GP102/09/P630; GA AV ČR KAN311610701
    Výzkumný záměr: CEZ:AV0Z20650511
    Klíčová slova: high resolution interferometry * laser comparator * precision displacement sensors
    Kód oboru RIV: BH - Optika, masery a lasery

    Presented paper deals with the description of subsystems of a novel interferometric nanocomparator. High speed digital quadrature detector based on digital signal controller is used here for processing of the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and allows achievement of sub-nanometer resolution and accuracy of the laser interferometer. The refractive index of the air is computed continuously from the current atmospheric values using Edlen's formula. High dynamic range of the mirror displacement setting is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators. The linear guide way is used for open-loop coarse positioning with 50 nm accuracy and up to 100 mm of displacement. Piezoelectric actuators in servo-loop linked to the interferometer value are used for fine positioning with better than 1 nm accuracy over a 5 μm range.
    Trvalý link: http://hdl.handle.net/11104/0179660