Search results
- 1.0324065 - FZÚ 2009 RIV CZ eng J - Journal Article
Olejníček, Jiří - Hubička, Zdeněk - Virostko, Petr - Deyneka, Alexander - Jastrabík, Lubomír - Adámek, P. - Šícha, M. - Tichý, M. - Šíchová, H.
Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system.
[Měření parametrů plazmatu během depozice tenkých vrstev BaxSr1-xTiO3 pomocí dvoutryskového plazmatického systému s efektem duté katody.]
Czechoslovak Journal of Physics. Roč. 56, Suppl. B (2006), B1283-B1289. ISSN 0011-4626
Institutional research plan: CEZ:AV0Z10100522
Keywords : BSTO thin films * hollow cathode sputtering * Langmuir probe * emission spectroscopy
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 0.568, year: 2006
Permanent Link: http://hdl.handle.net/11104/0005187 - 2.0027161 - FZÚ 2006 RIV US eng C - Conference Paper (international conference)
Ianno, N.J. - Soukup, R. J. - Hubička, Zdeněk - Olejníček, Jiří - Šíchová, Hana
RF Hollow Cathode Plasma Jet Deposition of BaxSr1-xTiO3 Films.
[Depozice vrstev BaxSr1-xTiO3 pomocí RF plasmové trysky.]
Materials, Integration and Technology for Monolithic Instruments. Pittsburgh: Warendale, PA, 2005 - (Theil, A.; Bohm, M.; Gardner, S.; Blalock, T.), D2.4.1-D2.4.6. Material Research Society Symposium Proc, 869. ISBN 1-55899-823-3.
[MRS Spring Meeting. San Francisco (US), 28.03.2005-01.04.2005]
R&D Projects: GA AV ČR(CZ) KJB1010302
Keywords : BSTO thin films * hollow cathode * emission spectroscopy
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0117285