Search results
- 1.0564978 - FZÚ 2023 RIV US eng C - Conference Paper (international conference)
Zehetner, J. - Vanko, G. - Izsák, T. - Kováčová, E. - Držík, M. - Dohnal, F. - Kromka, Alexander
Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques.
Proceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems. New York: IEEE, 2022 - (Marek, J.; Donoval, D.; Vavrinsky, E.), s. 195-198. ISBN 978-1-6654-6977-7.
[International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /14./. Smolenice (SK), 23.10.2022-26.10.2022]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : laser processing * MEMS * cantilevers * diamond
OECD category: Mechanical engineering
Permanent Link: https://hdl.handle.net/11104/0336554 - 2.0559039 - FZÚ 2023 RIV SK eng C - Conference Paper (international conference)
Vanko, G. - Andok, R. - Tomáška, M. - Wu, S.-R. - Vojs, M. - Hudec, B. - Marton, M. - Řeháček, V. - Kromka, Alexander - Izsák, T. - Chen, Y.-H. - Tsai, H.-Y.
Diamond-based RF MEMS microheaters for insects behavior monitoring.
Proceedings of ADEPT - ADEPT 2022. Žilina: University of Žilina, 2022 - (Feiler, M.; Ziman, M.; Kováčová, S.; Kováč, jr., J.), s. 145-148. ISBN 978-80-554-1884-1.
[10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022. Tatranská Lomnica (SK), 20.06.2022-24.06.2022]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : MEMS * drosophila * LC micro-heater * WBG materials * resonance circuit
OECD category: Materials engineering
Permanent Link: https://hdl.handle.net/11104/0332454 - 3.0559036 - FZÚ 2023 RIV SK eng C - Conference Paper (international conference)
Kromka, Alexander - Babčenko, Oleg - Izsák, Tibor - Varga, Marián - Vanko, G. - Zehetner, J. - Potocký, Štěpán
Growth of carbon allotropes in plasma CVD system.
Proceedings of ADEPT - ADEPT 2022. Žilina: University of Žilina, 2022 - (Feiler, M.; Ziman, M.; Kováčová, S.; Kováč, jr., J.), s. 17-20. ISBN 978-80-554-1884-1.
[10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022. Tatranská Lomnica (SK), 20.06.2022-24.06.2022]
R&D Projects: GA MŠMT(CZ) 8X20035; GA MŠMT LM2018110; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : diamond * carbon allotropes * carbon nanotubes * dual plasma
OECD category: Materials engineering
Permanent Link: https://hdl.handle.net/11104/0332451 - 4.0559035 - FZÚ 2023 RIV SK eng C - Conference Paper (international conference)
Zehetner, J. - Vanko, G. - Dohnal, F. - Izsák, T. - Držík, M. - Kromka, Alexander
Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments.
Proceedings of ADEPT - ADEPT 2022. Žilina: University of Žilina, 2022 - (Feiler, M.; Ziman, M.; Kováčová, S.; Kováč, jr., J.), s. 7-12. ISBN 978-80-554-1884-1.
[10th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2022. Tatranská Lomnica (SK), 20.06.2022-24.06.2022]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : harsh environment * diamond * SiC * MEMS * HEMT * laser ablation
OECD category: Materials engineering
Permanent Link: https://hdl.handle.net/11104/0332450 - 5.0540754 - FZÚ 2021 RIV CH eng C - Conference Paper (international conference)
Zehetner, J. - Kromka, Alexander - Izsák, Tibor - Vanko, G. - Gajdošová, L. - Kasemann, S.
Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications.
Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems. Basel: MDPI, 2020 - (Köck, A.; Deluca, M.), s. 1-3, č. článku 13. E-ISSN 2504-3900.
[International Conference on Functional Integrated nano Systems (nanoFIS 2020) /4./. Online (AT), 02.11.2020-04.11.2020]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : diamond * GaN * MEMS * laser ablation
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Permanent Link: http://hdl.handle.net/11104/0318359 - 6.0540753 - FZÚ 2021 RIV CH eng C - Conference Paper (international conference)
Izsák, Tibor - Vanko, G. - Držík, M. - Kasemann, S. - Zehetner, J. - Vojs, M. - Zaťko, B. - Potocký, Štěpán - Kromka, Alexander
Direct deposition of CVD diamond layers on the top of GaN membranes.
Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems. Basel: MDPI, 2020 - (Köck, A.; Deluca, M.), s. 1-3, č. článku 35. E-ISSN 2504-3900.
[International Conference on Functional Integrated nano Systems (nanoFIS 2020) /4./. Online (AT), 02.11.2020-04.11.2020]
R&D Projects: GA MŠMT LM2018110; GA MŠMT(CZ) 8X20035; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : diamond * GaN * CVD * stress
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Permanent Link: http://hdl.handle.net/11104/0318358 - 7.0540751 - FZÚ 2021 RIV US eng C - Conference Paper (international conference)
Izsák, Tibor - Vanko, G. - Držík, M. - Kasemann, S. - Zehetner, J. - Vojs, M. - Zaťko, B. - Potocký, Štěpán - Kromka, Alexander
Front-side diamond deposition on the GaN membranes.
Proceedings of the 13th International Conference on Advanced Semiconductor Devices And Microsystems. New York: IEEE, 2020 - (Vanko, G.; Izsák, T.), s. 42-45. ISBN 978-1-7281-9776-0.
[International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /13./. Smolenice (SK), 11.10.2020-14.10.2020]
R&D Projects: GA MŠMT LM2018110; GA MŠMT(CZ) 8X20035; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : diamond * GaN * CVD * stress
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Permanent Link: http://hdl.handle.net/11104/0318357 - 8.0540749 - FZÚ 2021 RIV US eng C - Conference Paper (international conference)
Babčenko, Oleg - Izsák, Tibor - Varga, Marián - Aubrechtová Dragounová, Kateřina - Potocký, Štěpán - Stehlík, Štěpán - Vanko, G. - Gajdošová, L. - Kasemann, S. - Zehetner, J. - Kromka, Alexander
Optimization of diamond growth on structured, soft and brittle substrates.
Proceedings of the 13th International Conference on Advanced Semiconductor Devices And Microsystems. New York: IEEE, 2020 - (Vanko, G.; Izsák, T.), s. 46-50, č. článku 20469. ISBN 978-1-7281-9776-0.
[International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /13./. Smolenice (SK), 11.10.2020-14.10.2020]
R&D Projects: GA MŠMT LM2018110; GA MŠMT(CZ) 8X20035; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : diamond film * CVD * nucleation * carbon foam
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Permanent Link: http://hdl.handle.net/11104/0318355