Search results
- 1.0567523 - FZÚ 2023 RIV GB eng J - Journal Article
Mareš, P. - Dubau, M. - Polášek, J. - Mates, Tomáš - Kozák, T. - Vyskočil, J.
High deposition rate films prepared by reactive HiPIMS.
Vacuum. Roč. 191, Sep (2021), č. článku 110329. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA MŠMT LM2018110; GA MŠMT(CZ) EF16_019/0000760; GA MPO FV30177
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; AV ČR(CZ) StrategieAV21/6
Program: StrategieAV
Institutional support: RVO:68378271
Keywords : reactive magnetron sputtering * HiPIMS * Monte-carlo simulations * deposition rate * sputtering yield
OECD category: Coating and films
Impact factor: 4.110, year: 2021
Method of publishing: Limited access
https://doi.org/10.1016/j.vacuum.2021.110329
Permanent Link: https://hdl.handle.net/11104/0338777 - 2.0562105 - FZÚ 2023 RIV CH eng J - Journal Article
Vyskočil, J. - Mareš, P. - Hubička, Zdeněk - Čada, Martin - Mates, Tomáš
Hybrid HiPIMS + controlled pulsed arc for deposition of hard coatings.
Surface and Coatings Technology. Roč. 446, Sep (2022), č. článku 128765. ISSN 0257-8972
R&D Projects: GA MPO FV30177
Institutional support: RVO:68378271
Keywords : HiPIMS * arc discharge * plasma * sputtering * cathodic arc evaporation
OECD category: Coating and films
Impact factor: 5.4, year: 2022
Method of publishing: Limited access
https://doi.org/10.1016/j.surfcoat.2022.128765
Permanent Link: https://hdl.handle.net/11104/0334526 - 3.0534023 - FZÚ 2021 RIV GB eng J - Journal Article
Pajdarova, A.D. - Kozák, T. - Hubička, Zdeněk - Čada, Martin - Mareš, P. - Čapek, J.
Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution.
Plasma Sources Science & Technology. Roč. 29, č. 8 (2020), s. 1-11, č. článku 085016. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MPO FV30177
Institutional support: RVO:68378271
Keywords : thin-films * HiPIMS * bipolar HiPIMS * positive pulse * plasma diagnostics * magnetron * Langmuir probe diagnostics
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.584, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-6595/aba773
Permanent Link: http://hdl.handle.net/11104/0312243 - 4.0534021 - FZÚ 2021 RIV GB eng J - Journal Article
Kozák, T. - Pajdarova, A.D. - Čada, Martin - Hubička, Zdeněk - Mareš, P. - Čapek, J.
Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude.
Plasma Sources Science & Technology. Roč. 29, č. 6 (2020), s. 1-10, č. článku 065003. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MPO FV30177
Institutional support: RVO:68378271
Keywords : HiPIMS * bipolar HiPIMS * positive pulse * plasma diagnostics * mass spectroscopy
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.584, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-6595/ab8fbb
Permanent Link: http://hdl.handle.net/11104/0312242 - 5.0533971 - FZÚ 2021 RIV US eng J - Journal Article
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Time-resolved diagnostics of a bipolar HiPIMS discharge.
Journal of Applied Physics. Roč. 127, č. 20 (2020), s. 1-10, č. článku 203303. ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA19-00579S; GA MPO FV30177
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : HiPIMS * bipolar * emission spectroscopy * yttrium * mass spectroscopy * energy resolved
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.546, year: 2020
Method of publishing: Limited access
https://doi.org/10.1063/5.0006425
Permanent Link: http://hdl.handle.net/11104/0312193 - 6.0533967 - FZÚ 2021 RIV US eng J - Journal Article
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge.
Applied Physics Letters. Roč. 116, č. 6 (2020), s. 1-4, č. článku 064101. ISSN 0003-6951. E-ISSN 1077-3118
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA19-00579S; GA MPO FV30177
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : plasma * HiPIMS sputtering * Langmuir probe
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.791, year: 2020
Method of publishing: Limited access
https://doi.org/10.1063/1.5140650
Permanent Link: http://hdl.handle.net/11104/0312191 - 7.0518879 - FZÚ 2020 RIV GB eng J - Journal Article
Hippler, Rainer - Čada, Martin - Straňák, Vítězslav - Hubička, Zdeněk
Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target.
Plasma Sources Science & Technology. Roč. 28, Nov (2019), s. 1-13, č. článku 115020. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA19-00579S; GA MPO FV30177
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : magnetron sputtering * HiPIMS * bipolar pulse * time-resolved optical emission spectroscopy * ion mass spectrometry
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.193, year: 2019
Method of publishing: Open access
Permanent Link: http://hdl.handle.net/11104/0303898File Download Size Commentary Version Access 0518879.pdf 5 2.2 MB CC licence Publisher’s postprint open-access