Search results
- 1.0567629 - ÚPT 2023 CZ eng A - Abstract
Podstránský, Jáchym - Drozd, Michal - Knápek, Alexandr
Automated defectoscopy of thin poly(methyl methacrylate) layers.
IMAPS Flash Conference, 8th International Microelectronics Assembly and Packaging Society Flash Conference. Extended abstracts. Brno: Brno University of Technology, 2022 - (Otáhal, A.; Szendiuch, I.; Skácel, J.). s. 41-42. ISBN 978-80-214-6111-6.
[IMAPS Flash Conference 2022. International Microelectronics Assembly and Packaging Society Flash Conference /8./. 26.10.2022-27.10.2022, Brno]
Institutional support: RVO:68081731
Keywords : defects in resist * rtificial intelligence * image processing * automatization
OECD category: Automation and control systems
Permanent Link: https://hdl.handle.net/11104/0338861 - 2.0512149 - ÚPT 2020 JO eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated system for optical inspection of defects in resist coated non-patterned wafer.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302361 - 3.0511777 - ÚPT 2020 eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated inspection of PMMA coating on non-patterned silicon wafers.
11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
[International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0302052