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  1. 1.
    0512149 - ÚPT 2020 JO eng A - Abstract
    Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
    Automated system for optical inspection of defects in resist coated non-patterned wafer.
    Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
    [The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
    R&D Projects: GA MPO FV10618
    Institutional support: RVO:68081731
    Keywords : dielectric surface inspection * resist coated wafer
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0302361
     
     
  2. 2.
    0511777 - ÚPT 2020 eng A - Abstract
    Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
    Automated inspection of PMMA coating on non-patterned silicon wafers.
    11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
    [International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
    R&D Projects: GA MPO FV10618
    Institutional support: RVO:68081731
    Keywords : dielectric surface inspection * resist coated wafer
    OECD category: Nano-processes (applications on nano-scale)
    Permanent Link: http://hdl.handle.net/11104/0302052