0565861 - ÚJF 2023 RIV FR eng C - Conference Paper (international conference)
Romanenko, Oleksandr V. - Jagerová, Adéla - Borodkin, Andrei - Havránek, Vladimír - Macková, Anna
One-step 3D microstructuring of PMMA using MeV light ions.
EPJ Web of Conferences. Vol. 261. Les ulis: EDP sciences, 2022, č. článku 02001. E-ISSN 2100-014X.
[Applied Nuclear Physics Conference (ANPC 2021). Prague (CZ), 12.09.2021-17.09.2021]
R&D Projects: GA ČR GA19-02482S
Research Infrastructure: CANAM II - 90056
Institutional support: RVO:61389005 ; RVO:67985882
Keywords : PMA * 3D microstructures * ion beam lithography
OECD category: Nuclear physics; Optics (including laser optics and quantum optics) (URE-Y)
Result website:
https://doi.org/10.1051/epjconf/202226102001DOI: https://doi.org/10.1051/epjconf/202226102001
Permanent Link: https://hdl.handle.net/11104/0337353