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- 1.0510668 - FZÚ 2020 RIV JP eng J - Journal Article
Amano, R. - Dinh, TH. - Sasanuma, A. - Arai, G. - Hara, H. - Fujii, Y. - Hatano, T. - Ejima, T. - Jiang, W. - Sunahara, A. - Takahashi, A. - Nakamura, D. - Okada, T. - Sakaue, K. - Miura, Taisuke - O'Sullivan, G. - Higashiguchi, T.
Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas.
Japanese Journal of Applied Physics. Roč. 57, č. 7 (2018), s. 1-5, č. článku 070311. ISSN 0021-4922. E-ISSN 1347-4065
R&D Projects: GA MŠMT LO1602; GA ČR GA16-12960S
Grant - others:AV ČR(CZ) JSPS-16-13
Program: Bilaterální spolupráce
Institutional support: RVO:68378271
Keywords : mid-IR laser pulses * EUV lithography applications * EUV emissions
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 1.471, year: 2018
Method of publishing: Limited access
https://doi.org/10.7567/jjap.57.070311
Permanent Link: http://hdl.handle.net/11104/0301085