Search results
- 1.0532029 - ÚPT 2021 RIV JO eng J - Journal Article
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated System for Optical Inspection of Defects in Resist-coated Non-patterned Wafer.
Jordan Journal of Physics. Roč. 13, č. 2 (2020), s. 93-100. ISSN 1994-7607. E-ISSN 1994-7615
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : optical inspection * resist layer * non-patterned wafer * quality control
OECD category: Automation and control systems
Method of publishing: Open access
http://journals.yu.edu.jo/jjp/JJPIssues/Vol13No2pdf2020/1.html
Permanent Link: http://hdl.handle.net/11104/0310631 - 2.0495264 - ÚPT 2019 RIV PL eng J - Journal Article
Knápek, Alexandr - Horáček, Miroslav - Chlumská, Jana - Kuparowitz, T. - Sobola, D. - Šikula, J.
Preparation and noise analysis of polymer graphite cathode.
Metrology and Measurement Systems. Roč. 25, č. 3 (2018), s. 451-458. ISSN 0860-8229. E-ISSN 2300-1941
R&D Projects: GA MŠMT ED0017/01/01; GA TA ČR(CZ) TE01020118
Institutional support: RVO:68081731
Keywords : field emission * polymer graphite * noise analysis
OECD category: Electrical and electronic engineering
Impact factor: 1.096, year: 2018
Permanent Link: http://hdl.handle.net/11104/0288267 - 3.0481762 - ÚPT 2018 RIV CZ cze J - Journal Article
Knápek, Alexandr - Horáček, Miroslav - Chlumská, Jana - Král, Stanislav
Studená autoemisní katoda z tuhy do mikrotužky?
[A cold field-emission cathode from micro-pencil graphite?]
Jemná mechanika a optika. Roč. 62, č. 10 (2017), s. 251-253. ISSN 0447-6441
R&D Projects: GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : polymer graphite * field emission of electrons
OECD category: Materials engineering
Permanent Link: http://hdl.handle.net/11104/0277313 - 4.0477724 - ÚPT 2018 RIV NL eng J - Journal Article
Knápek, Alexandr - Sýkora, Jiří - Chlumská, Jana - Sobola, D.
Programmable set-up for electrochemical preparation of STM tips and ultra-sharp field emission cathodes.
Microelectronic Engineering. Roč. 173, APR 5 (2017), s. 42-47. ISSN 0167-9317. E-ISSN 1873-5568
R&D Projects: GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : field emission cathode * STM tip * electrochemical etching
OECD category: Chemical process engineering
Impact factor: 2.020, year: 2017
Permanent Link: http://hdl.handle.net/11104/0273973 - 5.0452395 - ÚPT 2016 RIV CZ cze J - Journal Article
Krátký, Stanislav - Urbánek, Michal - Chlumská, Jana - Matějka, Milan - Meluzín, Petr - Kolařík, Vladimír - Horáček, Miroslav
Kombinace elektronové litografie s gaussovským svazkem a s proměnným tvarovaným svazkem.
[Combination of electron lithography with Gaussian and shaped beams.]
Jemná mechanika a optika. Roč. 60, č. 1 (2015), s. 10-13. ISSN 0447-6441
R&D Projects: GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : e-beam writer * Gausssian beam * variable shaped beam
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0253409