Search results
- 1.0514120 - ÚPT 2020 JO eng A - Abstract
Mousa, M. S. - Chlumská, Jana - Knápek, Alexandr
Similarities and Differences between two researches in Field Electron Emission: Way to develop more powerful electron source.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
Institutional support: RVO:68081731
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302366
- 2.0512151 - ÚPT 2020 JO eng A - Abstract
Matějka, Milan - Chlumská, Jana - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
Fabrication of functional nanostructures in thin silicon nitride membranes.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
Institutional support: RVO:68081731
Keywords : thin dielectric layers * silicon nitride * membranes * electron beam lithography
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302363
- 3.0512149 - ÚPT 2020 JO eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated system for optical inspection of defects in resist coated non-patterned wafer.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302361
- 4.0511777 - ÚPT 2020 eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated inspection of PMMA coating on non-patterned silicon wafers.
11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
[International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0302052
- 5.0429465 - ÚPT 2015 GB eng A - Abstract
Krátký, Stanislav - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Horáček, Miroslav - Chlumská, Jana - Neděla, Vilém - Jaffrezic-Renault, N. - Krejčí, J. - Kučerová, R. - Plička, R. - Krejčí, T.
Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam.
39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 387.
[MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
Institutional support: RVO:68081731
Keywords : differential conductometry biosensor * electron-beam lithography * microorganism detection
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0234577
- 6.0429463 - ÚPT 2015 GB eng A - Abstract
Urbánek, Michal - Matějka, Milan - Kolařík, Vladimír - Horáček, Miroslav - Krátký, Stanislav - Bok, Jan - Chlumská, Jana - Mikšík, P. - Vašina, J.
Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures.
39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 582.
[MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
Institutional support: RVO:68081731
Keywords : rectangular shaped beam * proximity effect simulation * binary structures and relief structures
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0234576