Search results
- 1.0579072 - ÚPT 2024 RIV CZ cze V - Research Report
Matějka, Milan - Krátký, Stanislav - Meluzín, Petr - Košelová, Zuzana - Chlumská, Jana - Horáček, Miroslav - Kolařík, Vladimír - Knápek, Alexandr
SMV-2023-06: Vývoj testovacích preparátů pro REM.
[SMV-2023-06: Development of test specimens for SEM.]
Brno: TESCAN Brno a.s., 2023. 4 s.
Source of funding: N - Non-public resources
Keywords : relief structure * e-beam lithography * silicon etching * microlithography
OECD category: Optics (including laser optics and quantum optics)
Permanent Link: https://hdl.handle.net/11104/0347946 - 2.0579070 - ÚPT 2024 RIV CZ cze V - Research Report
Matějka, Milan - Krátký, Stanislav - Meluzín, Petr - Košelová, Zuzana - Chlumská, Jana - Horáček, Miroslav - Kolařík, Vladimír - Knápek, Alexandr
SMV-2023-05: DI2023.
[SMV-2023-05: DI2023.]
Brno: DELONG INSTRUMENTS a.s., 2023. 4 s.
Source of funding: N - Non-public resources
Keywords : relief structure * e-beam lithography * silicon etching * microlithography
OECD category: Optics (including laser optics and quantum optics)
Permanent Link: https://hdl.handle.net/11104/0347943 - 3.0573409 - ÚPT 2024 RIV CZ cze V - Research Report
Knápek, Alexandr - Horáček, Miroslav - Klein, Pavel
SMV-2023-03: Držák autoemisních katod.
[SMV-2023-03: Holder for field-emission cathodes.]
Brno: Department of Physics, Mu'tah University, 2023. 4 s.
Source of funding: N - Non-public resources
Keywords : field-emission cathode holder * relief structure * modular holder
OECD category: Electrical and electronic engineering
Permanent Link: https://hdl.handle.net/11104/0343861 - 4.0536030 - ÚPT 2021 CZ cze V - Research Report
Matějka, Milan - Horáček, Miroslav - Meluzín, Petr - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír - Krátký, Stanislav - Knápek, Alexandr
SMV-2020-24: Vývoj testovacích preparátů pro REM.
[SMV-2020-24: Development of test specimens for SEM.]
Brno: Delong Instruments, a.s., 2020. 7 s.
Source of funding: N - Non-public resources
Keywords : relief structure: e-beam lithography * relief structure: silicon etching * silicon etching * microlithography
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0313879 - 5.0518131 - ÚPT 2020 RIV CZ cze V - Research Report
Matějka, Milan - Horáček, Miroslav - Meluzín, Petr - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír - Krátký, Stanislav - Knápek, Alexandr
SMV-2019-06: Vývoj testovacích preparátů pro REM.
[SMV-2019-06: Development of test specimens for SEM.]
Brno: TESCAN Brno s.r.o., 2019. 4 s.
Source of funding: N - Non-public resources
Keywords : calibration specimen * relief structure * e-beam lithography * silicon etching * microlithography
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0303306 - 6.0498864 - ÚPT 2019 RIV CZ cze V - Research Report
Matějka, Milan - Horáček, Miroslav - Meluzín, Petr - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír - Krátký, Stanislav - Knápek, Alexandr
SMV-2018-05: Vývoj testovacích preparátů pro REM.
[SMV-2018-05: Development of test specimens for SEM.]
Brno: TESCAN Brno, 2018. 5 s.
Source of funding: N - Non-public resources
Keywords : relief structure * e-beam lithography * silicon etching * microlithography
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0291155 - 7.0483401 - ÚPT 2018 RIV CZ cze V - Research Report
Matějka, Milan - Horáček, Miroslav - Meluzín, Petr - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír - Krátký, Stanislav - Knápek, Alexandr
SMV-2017-06: Vývoj testovacích preparátů pro REM.
[SMV-2017-06: Development of test specimens for SEM.]
Brno: TESCAN, 2017. 6 s.
Source of funding: N - Non-public resources
Keywords : relief structure * e-beam lithography * silicon etching * microlithography
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0278733