Search results
- 1.0464388 - ÚPT 2018 RIV CZ eng C - Conference Paper (international conference)
Matějka, Milan - Kolařík, Vladimír - Horáček, Miroslav - Král, Stanislav
Parameter Optimization of Multi-Level Diffraction Gratings.
NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. Ostrava: Tanger, 2017, s. 751-756. ISBN 978-80-87294-71-0.
[NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./. Brno (CZ), 19.10.2016-21.10.2016]
R&D Projects: GA MPO FR-TI1/576; GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : e-beam pattern generator * variable shaped beam * grayscale lithography * multi-level grating
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0270769 - 2.0390983 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Kolařík, Vladimír - Horáček, Miroslav - Matějka, František - Matějka, Milan - Urbánek, Michal - Krátký, Stanislav - Král, Stanislav - Bok, Jan
E-beam pattern generator BS600 and technology zoom.
NANOCON 2012, 4th International Conference Proceedings. Ostrava: TANGER Ltd, 2012, s. 822-825. ISBN 978-80-87294-32-1.
[NANOCON 2012. International Conference /4./. Brno (CZ), 23.10.2012-25.10.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA MPO FR-TI1/576
Institutional support: RVO:68081731
Keywords : E-beam pattern generator * E-beam lithography * reduced size shaped beam
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0219948 - 3.0390982 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Matějka, Milan - Urbánek, M. - Kolařík, V. - Horáček, M. - Krátký, Stanislav - Mikšík, P. - Vašina, J.
Variable-shape E-beam litography: Proximity effect simulation of 3D micro and nano sructures.
NANOCON 2012, 4th International Conference Proceedings. Ostrava: TANGER Ltd, 2012, s. 729-732. ISBN 978-80-87294-32-1.
[NANOCON 2012. International Conference /4./. Brno (CZ), 23.10.2012-25.10.2012]
R&D Projects: GA MPO FR-TI1/576; GA MŠMT ED0017/01/01; GA TA ČR TE01020233
Institutional support: RVO:68081731
Keywords : 3D resist structures * variable shape electron beam lithography * proximity effect simulation and correction * polymer resist * development process simulation
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0219947 - 4.0390977 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Urbánek, Michal - Kolařík, Vladimír - Matějka, Milan - Matějka, František - Bok, Jan - Mikšík, P. - Vašina, J.
Shaped E-beam nanopatterning with proximity effect correction.
NANOCON 2012, 4th International Conference Proceedings. Ostrava: TANGER Ltd, 2012, s. 717-722. ISBN 978-80-87294-32-1.
[NANOCON 2012. International Conference /4./. Brno (CZ), 23.10.2012-25.10.2012]
R&D Projects: GA MPO FR-TI1/576; GA MŠMT ED0017/01/01; GA TA ČR TE01020233
Institutional support: RVO:68081731
Keywords : e-beam writer * shaped beam * proximity effect correction
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0219844 - 5.0390976 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Kolařík, Vladimír - Matějka, Milan - Matějka, František - Krátký, Stanislav - Urbánek, Michal - Horáček, Miroslav - Král, Stanislav - Bok, Jan
Calibration specimens for microscopy.
NANOCON 2012, 4th International Conference Proceedings. Ostrava: TANGER Ltd, 2012, s. 713-716. ISBN 978-80-87294-32-1.
[NANOCON 2012. International Conference /4./. Brno (CZ), 23.10.2012-25.10.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA TA ČR TE01020233; GA MPO FR-TI1/576
Institutional support: RVO:68081731
Keywords : E-beam technology * calibration specimen * scanning electron microscopy
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0219838 - 6.0390975 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Bok, Jan - Horáček, Miroslav - Král, Stanislav - Kolařík, Vladimír - Matějka, František
Analysis of electron current instability in E-beam writer.
NANOCON 2012, 4th International Conference Proceedings. Ostrava: TANGER Ltd, 2012, s. 295-299. ISBN 978-80-87294-32-1.
[NANOCON 2012. International Conference /4./. Brno (CZ), 23.10.2012-25.10.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA TA ČR TE01020118; GA MPO FR-TI1/576
Institutional support: RVO:68081731
Keywords : electron beam * current measurement * current drift and noise * fourier analysis
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0219831 - 7.0386400 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Kolařík, Vladimír - Matějka, Milan - Urbánek, Michal - Král, Stanislav - Krátký, Stanislav - Mikšík, P. - Vašina, J.
Proximity effect simulation for variable shape e-beam writer.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 75-76. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA MPO FR-TI1/576
Institutional support: RVO:68081731
Keywords : electron scattering effects * e-beam writer * computer simulation
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0215699 - 8.0386385 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Bok, Jan - Kolařík, Vladimír
Measurements of current density distribution in e-beam writer.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 7-8. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA MPO FR-TI1/576
Institutional support: RVO:68081731
Keywords : measurement of current density * e-beam writer
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0215682 - 9.0375381 - ÚPT 2012 RIV CZ eng C - Conference Paper (international conference)
Matějka, Milan - Urbánek, Michal - Kolařík, Vladimír
Scanning Probe Microscopy: Measuring on Hard Surfaces.
NANOCON 2011. 3rd International Conference. Ostrava: Tanger spol. s r. o, 2011, s. 701-704. ISBN 978-80-87294-27-7.
[NANOCON 2011. International Conference /3./. Brno (CZ), 21.09.2011-23.09.2011]
R&D Projects: GA MPO FR-TI1/576; GA MŠMT ED0017/01/01
Institutional research plan: CEZ:AV0Z20650511
Keywords : scanning probe microscopy * atomic force microscopy * hard surface samples measuring * image artifacts * polymer coatings
Subject RIV: JP - Industrial Processing
Permanent Link: http://hdl.handle.net/11104/0208052 - 10.0375380 - ÚPT 2012 RIV CZ eng C - Conference Paper (international conference)
Urbánek, Michal - Kolařík, Vladimír - Matějka, Milan
SPM Nanoscratching in the Sub 100 nm Resolution.
NANOCON 2011. 3rd International Conference. Ostrava: Tanger spol. s r. o, 2011, s. 213-217. ISBN 978-80-87294-27-7.
[NANOCON 2011. International Conference /3./. Brno (CZ), 21.09.2011-23.09.2011]
R&D Projects: GA MPO FR-TI1/576; GA MŠMT ED0017/01/01
Institutional research plan: CEZ:AV0Z20650511
Keywords : SPM microscopy * nanoscratching
Subject RIV: JP - Industrial Processing
Permanent Link: http://hdl.handle.net/11104/0208051