Search results
- 1.0532029 - ÚPT 2021 RIV JO eng J - Journal Article
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated System for Optical Inspection of Defects in Resist-coated Non-patterned Wafer.
Jordan Journal of Physics. Roč. 13, č. 2 (2020), s. 93-100. ISSN 1994-7607. E-ISSN 1994-7615
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : optical inspection * resist layer * non-patterned wafer * quality control
OECD category: Automation and control systems
Method of publishing: Open access
http://journals.yu.edu.jo/jjp/JJPIssues/Vol13No2pdf2020/1.html
Permanent Link: http://hdl.handle.net/11104/0310631 - 2.0481762 - ÚPT 2018 RIV CZ cze J - Journal Article
Knápek, Alexandr - Horáček, Miroslav - Chlumská, Jana - Král, Stanislav
Studená autoemisní katoda z tuhy do mikrotužky?
[A cold field-emission cathode from micro-pencil graphite?]
Jemná mechanika a optika. Roč. 62, č. 10 (2017), s. 251-253. ISSN 0447-6441
R&D Projects: GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : polymer graphite * field emission of electrons
OECD category: Materials engineering
Permanent Link: http://hdl.handle.net/11104/0277313 - 3.0477782 - ÚPT 2018 RIV NL eng J - Journal Article
Krátký, Stanislav - Kolařík, Vladimír - Horáček, Miroslav - Meluzín, Petr - Král, Stanislav
Combined e-beam lithography using different energies.
Microelectronic Engineering. Roč. 177, JUN (2017), s. 30-34. ISSN 0167-9317. E-ISSN 1873-5568
R&D Projects: GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : grayscale e-beam lithography * mix and match process * absorbed energy density * resist sensitivity * micro-optical elements
OECD category: Nano-processes (applications on nano-scale)
Impact factor: 2.020, year: 2017
Permanent Link: http://hdl.handle.net/11104/0274006