Search results
- 1.0584778 - ÚPT 2024 CZ cze A - Abstract
Brunn, Ondřej - Knápek, Alexandr - Matějka, Milan - Krátký, Stanislav - Horáček, Miroslav - Meluzín, Petr - Chlumská, Jana - Sadílek, Jakub - Burda, Daniel - Král, Stanislav - Ondříšková, Martina - Podstránský, Jáchym - Košelová, Zuzana - Allaham, Mohammad M. - Kolařík, Vladimír
Elektronová litografie a funkční nanostruktury.
IMAPS Flash Conference. 9th International Microelectronics Assembly and Packaging Society Flash Conference. Extended abstracts. Brno: Brno University of Technology, FEEC, 2023 - (Otáhal, A.; Szendiuch, I.; Skácel, J.). s. 12-13. ISBN 978-80-214-6185-7.
[IMAPS Flash Conference 2023. International Microelectronics Assembly and Packaging Society Flash Conference /9./. 26.10.2023-27.10.2023, Brno]
Research Infrastructure: CzechNanoLab - 90110
Institutional support: RVO:68081731
OECD category: Electrical and electronic engineering
Permanent Link: https://hdl.handle.net/11104/0352625 - 2.0584775 - ÚPT 2024 CZ cze A - Abstract
Matějka, Milan - Černý, Š.
Využití nanotechnologie dvoufotonové litografie.
IMAPS Flash Conference. 9th International Microelectronics Assembly and Packaging Society Flash Conference. Extended abstracts. Brno: Brno University of Technology, FEEC, 2023 - (Otáhal, A.; Szendiuch, I.; Skácel, J.). s. 14-15. ISBN 978-80-214-6185-7.
[IMAPS Flash Conference 2023. International Microelectronics Assembly and Packaging Society Flash Conference /9./. 26.10.2023-27.10.2023, Brno]
Institutional support: RVO:68081731
Permanent Link: https://hdl.handle.net/11104/0352623 - 3.0568602 - ÚPT 2023 CZ eng A - Abstract
Krutil, Vojtěch - Dupák, Libor - Fořt, Tomáš - Matějka, Milan - Srnka, Aleš - Vlček, Ivan - Urban, Pavel
Cryogenic Sample Holder with Electrical Contacts for UHV SEM/SPM.
16th Multinational Congress on Microscopy, 16MCM, 04-09 September 2022, Brno, Czech Republic. Book of abstracts. Brno: Czechoslovak Microscopy Society, 2022 - (Krzyžánek, V.; Hrubanová, K.; Hozák, P.; Müllerová, I.; Šlouf, M.). s. 142-143. ISBN 978-80-11-02253-2.
[Multinational Congress on Microscopy /16./. 04.09.2022-09.09.2022, Brno]
R&D Projects: GA TA ČR TE01020233
Institutional support: RVO:68081731
https://www.16mcm.cz/wp-content/uploads/2022/09/16MCM-abstract-book.pdf
Permanent Link: https://hdl.handle.net/11104/0339871 - 4.0540306 - ÚPT 2021 CZ eng A - Abstract
Řiháček, Tomáš - Horák, M. - Schachinger, T. - Mika, Filip - Matějka, Milan - Fořt, Tomáš - Radlička, Tomáš - Novák, L. - Seďa, B. - McMorran, B.J. - Béché, A. - Verbeeck, J. - Müllerová, Ilona
Electron vortex beams in the scanning electron microscope.
Microscopy 2020. Praha: Československá mikroskopická společnost, 2020. s. 42.
[Microscopy 2020. 06.10.2020-07.10.2020, Lednice]
R&D Projects: GA TA ČR(CZ) TN01000008
Institutional support: RVO:68081731
Keywords : electron vortex beams * SEM
OECD category: Electrical and electronic engineering
Permanent Link: http://hdl.handle.net/11104/0317957 - 5.0512151 - ÚPT 2020 JO eng A - Abstract
Matějka, Milan - Chlumská, Jana - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
Fabrication of functional nanostructures in thin silicon nitride membranes.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
Institutional support: RVO:68081731
Keywords : thin dielectric layers * silicon nitride * membranes * electron beam lithography
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302363 - 6.0512149 - ÚPT 2020 JO eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated system for optical inspection of defects in resist coated non-patterned wafer.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302361 - 7.0512017 - ÚPT 2020 CZ eng A - Abstract
Matějka, Milan - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
Functional nano–structuring of thin silicon nitride membranes.
5th IMAPS Flash Conference. Book of Abstracts. Brno: University of Technology, 2019. s. 74-75.
[International Microelectronics Assembly and Packaging Society Flash Conference /5./. IMAPS. 24.10.2019-25.10.2019, Brno]
Institutional support: RVO:68081731
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302234 - 8.0511777 - ÚPT 2020 eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated inspection of PMMA coating on non-patterned silicon wafers.
11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
[International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0302052 - 9.0510323 - ÚPT 2020 DE eng A - Abstract
Řiháček, Tomáš - Mika, Filip - Horák, M. - Schachinger, T. - Matějka, Milan - Krátký, Stanislav - Müllerová, Ilona
Creation and detection of electron vortex beams in a scanning electron microscope.
Microscopy Conference: MC 2019. Abstracts. Berlin: DSE, 2019. s. 409-410.
[Microscopy Conference : MC 2019. 01.09.2019-05.09.2019, Berlin]
R&D Projects: GA TA ČR(CZ) TN01000008
Institutional support: RVO:68081731
Keywords : detection of electron vortex beams * SEM
OECD category: Nano-materials (production and properties)
https://www.microscopy-conference.de
Permanent Link: http://hdl.handle.net/11104/0300832 - 10.0495256 - ÚPT 2019 CZ eng A - Abstract
Horáček, Miroslav - Meluzín, Petr - Krátký, Stanislav - Matějka, Milan - Knápek, Alexandr - Kolařík, Vladimír
Spiral Arrangement: from Nanostructures to Packaging.
IMAPS Flash Conference. 4th Interrnational Microelectronics Assembly and Packaging Society Flash Conference. Book of Abstracts. Brno: University of Technbology Brno, 2018. s. 62-63. ISBN 978-80-214-5680-8.
[IMAPS Flash Conference. Interrnational Microelectronics Assembly and Packaging Society Flash Conference /4./. 25.10.2018-26.10.2018, Brno]
Institutional support: RVO:68081731
Keywords : electron beam lithography * phyllotaxis * spiral arrangement * parastichy
OECD category: Electrical and electronic engineering
Permanent Link: http://hdl.handle.net/11104/0288490