Search results

  1. 1.
    0540306 - ÚPT 2021 CZ eng A - Abstract
    Řiháček, Tomáš - Horák, M. - Schachinger, T. - Mika, Filip - Matějka, Milan - Fořt, Tomáš - Radlička, Tomáš - Novák, L. - Seďa, B. - McMorran, B.J. - Béché, A. - Verbeeck, J. - Müllerová, Ilona
    Electron vortex beams in the scanning electron microscope.
    Microscopy 2020. Praha: Československá mikroskopická společnost, 2020. s. 42.
    [Microscopy 2020. 06.10.2020-07.10.2020, Lednice]
    R&D Projects: GA TA ČR(CZ) TN01000008
    Institutional support: RVO:68081731
    Keywords : electron vortex beams * SEM
    OECD category: Electrical and electronic engineering
    Permanent Link: http://hdl.handle.net/11104/0317957

               
     
     
  2. 2.
    0512151 - ÚPT 2020 JO eng A - Abstract
    Matějka, Milan - Chlumská, Jana - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
    Fabrication of functional nanostructures in thin silicon nitride membranes.
    Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
    [The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
    Institutional support: RVO:68081731
    Keywords : thin dielectric layers * silicon nitride * membranes * electron beam lithography
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0302363

               
     
     
  3. 3.
    0512149 - ÚPT 2020 JO eng A - Abstract
    Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
    Automated system for optical inspection of defects in resist coated non-patterned wafer.
    Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
    [The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
    R&D Projects: GA MPO FV10618
    Institutional support: RVO:68081731
    Keywords : dielectric surface inspection * resist coated wafer
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0302361

               
     
     
  4. 4.
    0512017 - ÚPT 2020 CZ eng A - Abstract
    Matějka, Milan - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
    Functional nano–structuring of thin silicon nitride membranes.
    5th IMAPS Flash Conference. Book of Abstracts. Brno: University of Technology, 2019. s. 74-75.
    [International Microelectronics Assembly and Packaging Society Flash Conference /5./. IMAPS. 24.10.2019-25.10.2019, Brno]
    Institutional support: RVO:68081731
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0302234

               
     
     
  5. 5.
    0511777 - ÚPT 2020 eng A - Abstract
    Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
    Automated inspection of PMMA coating on non-patterned silicon wafers.
    11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
    [International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
    R&D Projects: GA MPO FV10618
    Institutional support: RVO:68081731
    Keywords : dielectric surface inspection * resist coated wafer
    OECD category: Nano-processes (applications on nano-scale)
    Permanent Link: http://hdl.handle.net/11104/0302052

               
     
     
  6. 6.
    0510323 - ÚPT 2020 DE eng A - Abstract
    Řiháček, Tomáš - Mika, Filip - Horák, M. - Schachinger, T. - Matějka, Milan - Krátký, Stanislav - Müllerová, Ilona
    Creation and detection of electron vortex beams in a scanning electron microscope.
    Microscopy Conference: MC 2019. Abstracts. Berlin: DSE, 2019. s. 409-410.
    [Microscopy Conference : MC 2019. 01.09.2019-05.09.2019, Berlin]
    R&D Projects: GA TA ČR(CZ) TN01000008
    Institutional support: RVO:68081731
    Keywords : detection of electron vortex beams * SEM
    OECD category: Nano-materials (production and properties)
    https://www.microscopy-conference.de
    Permanent Link: http://hdl.handle.net/11104/0300832

               
     
     
  7. 7.
    0495256 - ÚPT 2019 CZ eng A - Abstract
    Horáček, Miroslav - Meluzín, Petr - Krátký, Stanislav - Matějka, Milan - Knápek, Alexandr - Kolařík, Vladimír
    Spiral Arrangement: from Nanostructures to Packaging.
    IMAPS Flash Conference. 4th Interrnational Microelectronics Assembly and Packaging Society Flash Conference. Book of Abstracts. Brno: University of Technbology Brno, 2018. s. 62-63. ISBN 978-80-214-5680-8.
    [IMAPS Flash Conference. Interrnational Microelectronics Assembly and Packaging Society Flash Conference /4./. 25.10.2018-26.10.2018, Brno]
    Institutional support: RVO:68081731
    Keywords : electron beam lithography * phyllotaxis * spiral arrangement * parastichy
    OECD category: Electrical and electronic engineering
    Permanent Link: http://hdl.handle.net/11104/0288490

               
     
     
  8. 8.
    0429465 - ÚPT 2015 GB eng A - Abstract
    Krátký, Stanislav - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Horáček, Miroslav - Chlumská, Jana - Neděla, Vilém - Jaffrezic-Renault, N. - Krejčí, J. - Kučerová, R. - Plička, R. - Krejčí, T.
    Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam.
    39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 387.
    [MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
    Institutional support: RVO:68081731
    Keywords : differential conductometry biosensor * electron-beam lithography * microorganism detection
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0234577

               
     
     
  9. 9.
    0429463 - ÚPT 2015 GB eng A - Abstract
    Urbánek, Michal - Matějka, Milan - Kolařík, Vladimír - Horáček, Miroslav - Krátký, Stanislav - Bok, Jan - Chlumská, Jana - Mikšík, P. - Vašina, J.
    Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures.
    39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 582.
    [MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
    Institutional support: RVO:68081731
    Keywords : rectangular shaped beam * proximity effect simulation * binary structures and relief structures
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0234576