Search results
- 1.0350664 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Mika, Filip - Hovorka, Miloš - Frank, Luděk
Imaging of dopants under presence of surface ad-layers.
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 35-36. ISBN 978-80-254-6842-5.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
R&D Projects: GA ČR GP102/09/P543
Institutional research plan: CEZ:AV0Z20650511
Keywords : scanning electron microscopy * semiconductor structures * image contrast * dopant concentration * secondary electron emission
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://arl-repository.lib.cas.cz/uloziste_av/UPT-D/cav_un_epca-0350664_01.pdf
Permanent Link: http://hdl.handle.net/11104/0190604 - 2.0350658 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Hovorka, Miloš - Konvalina, Ivo - Frank, Luděk
Mapping of dopants by electron injection.
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 15-16. ISBN 978-80-254-6842-5.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
R&D Projects: GA ČR GP102/09/P543; GA AV ČR IAA100650803
Institutional research plan: CEZ:AV0Z20650511
Keywords : silicon structures * secondary electron emission * very low energy range * mapping dopants
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://arl-repository.lib.cas.cz/uloziste_av/UPT-D/cav_un_epca-0350658_01.pdf
Permanent Link: http://hdl.handle.net/11104/0190598 - 3.0335293 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Hovorka, Miloš - Mika, Filip - Frank, Luděk - Mikulík, P.
Profiling of N-Type Dopants in Silicon Based Structures.
Proceedings of the 4th Czech-Japan-China Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology (CJCS’09). Brno: ISI AS CR, 2009 - (Pokorná, Z.; Mika, F.), s. 14. ISBN 978-80-254-4535-8.
[CJCS’09 - Czech-Japan-China Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology /4./. Brno (CZ), 10.08.2009-14.08.2009]
R&D Projects: GA ČR GP102/09/P543; GA AV ČR IAA100650803
Institutional research plan: CEZ:AV0Z20650511
Keywords : n-type substrate * SEM * PEEM * doping levels
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0179799 - 4.0335263 - ÚPT 2010 RIV AT eng C - Conference Paper (international conference)
Mika, Filip - Hovorka, Miloš - Frank, Luděk
Secondary electron contrast in doped semiconductor with presence of a surface ad-layer.
MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Graz: Verlag der Technischen Universität, 2009, Vol. 1: 199-200. ISBN 978-3-85125-062-6.
[MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./. Graz (AT), 30.08.2009-04.09.2009]
R&D Projects: GA ČR GP102/09/P543; GA AV ČR IAA100650803
Institutional research plan: CEZ:AV0Z20650511
Keywords : dopant contrast * secondary electrons * semiconductor
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.univie.ac.at/asem/Graz_MC_09/papers/51426.pdf
Permanent Link: http://hdl.handle.net/11104/0179773 - 5.0335261 - ÚPT 2010 RIV AT eng C - Conference Paper (international conference)
Hovorka, Miloš - Mika, Filip - Frank, Luděk
Profiling of N-type dopants in silicon structures.
MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Graz: Verlag der Technischen Universität, 2009, Vol. 1: 181-182. ISBN 978-3-85125-062-6.
[MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./. Graz (AT), 30.08.2009-04.09.2009]
R&D Projects: GA ČR GP102/09/P543; GA AV ČR IAA100650803
Institutional research plan: CEZ:AV0Z20650511
Keywords : silicon * dopants * PEEM * SEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.univie.ac.at/asem/Graz_MC_09/papers/19923.pdf
Permanent Link: http://hdl.handle.net/11104/0179772