Search results
- 1.0335019 - FZÚ 2010 RIV DE eng J - Journal Article
Čada, Martin - Virostko, Petr - Kment, Štěpán - Hubička, Zdeněk
Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems.
[Porovnávací studie celkové výkonové hustoty na substrát v pulzním DC magnetronovém výboji a v plazma-jetu s dutou katodou.]
Plasma Processes and Polymers. Roč. 6, S1 (2009), S247-S252. ISSN 1612-8850. E-ISSN 1612-8869.
[International Conference on Plasma Surface Engineering /11./. Garmisch Partenkirchen, 15.09.2008-19.09.2008]
R&D Projects: GA AV ČR KAN301370701; GA AV ČR KJB100100707; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : calorimeter probe * floating substrate * magnetron * plasma jet * pulsed discharge
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 4.037, year: 2009
Permanent Link: http://hdl.handle.net/11104/0179607 - 2.0334316 - FZÚ 2010 RIV GB eng J - Journal Article
Čada, Martin - Virostko, Petr - Kment, Štěpán - Hubička, Zdeněk
Measurement of total energy flux density at a substrate during TiOx thin film deposition by using a plasma jet system.
Vacuum. Roč. 83, č. 4 (2009), s. 738-744. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA AV ČR KJB100100707; GA AV ČR KAN301370701
Institutional research plan: CEZ:AV0Z10100522
Keywords : hollow cathode * plasma jet * sputtering * pulsed DC * energy influx on substrate * TiO2
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 0.975, year: 2009
http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TW4-4SJ2WRT-2&_user=625012&_rdoc=1&_fmt=&_orig=search&_sort=d&view=c&_acct=C000031722&_vers
Permanent Link: http://hdl.handle.net/11104/0179088 - 3.0333649 - FZÚ 2010 RIV JP eng J - Journal Article
Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Kment, Štěpán - Jastrabík, Lubomír - Tichý, M.
A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet.
[Studium iontového toku během depozice tenkých vrstev titanu pomocí plazmové trysky s efektem duté katody.]
Journal of Plasma and Fusion Research SERIES. Roč. 8, - (2009), 719-723. ISSN 1883-9630.
[Proceedings of the 14th International Congress on Plasma Physics (ICPP2008). Fukuoka, 08.09.2008-12.09.2008]
R&D Projects: GA AV ČR KJB100100707; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : ion flux * plasma jet * hollow cathode * plasma diagnostics
Subject RIV: BL - Plasma and Gas Discharge Physics
http://www.jspf.or.jp/JPFRS/PDF/Vol8/jpfrs2009_08-0719.pdf
Permanent Link: http://hdl.handle.net/11104/0178588 - 4.0333224 - FZÚ 2010 RIV JP eng J - Journal Article
Tichý, M. - Hubička, Zdeněk - Virostko, Petr - Picková, I. - Šícha, M. - Čada, Martin - Olejníček, Jiří - Churpita, Olexandr - Jastrabík, Lubomír - Adámek, Petr - Kudrna, Pavel - Klusoň, Jan - Leshkov, S. - Chichina, Mariya - Kment, Štěpán
Langmuir probe measurements of spatial plasma profiles and temporal dependences in a DC-energized hollow-cathode plasma jet system.
[Měření prostorových profilů a časových závislostí parametrů plazmatu za použití langmuirovské sondy ve stejnosměrně buzeném tryskovém výboji s efektem duté katody.]
Journal of Plasma and Fusion Research SERIES. Roč. 8, - (2009), s. 1277-1282. ISSN 1883-9630.
[Proceedings of the 14th International Congress on Plasma Physics (ICPP2008). Fukuoka, 08.09.2008-12.09.2008]
R&D Projects: GA AV ČR KAN301370701; GA AV ČR KJB100100707; GA MŠMT(CZ) 1M06002; GA ČR GA202/09/0800
Institutional research plan: CEZ:AV0Z10100522
Keywords : Langmuir probe * plasma jet system * spatial distribution * pulsed discharge
Subject RIV: BL - Plasma and Gas Discharge Physics
http://www.jspf.or.jp/JPFRS/PDF/Vol8/jpfrs2009_08-1277.pdf
Permanent Link: http://hdl.handle.net/11104/0178266 - 5.0326764 - FZÚ 2010 RIV CH eng J - Journal Article
Olejníček, Jiří - Hubička, Zdeněk - Čada, Martin - Virostko, Petr - Kment, Štěpán - Adámek, Petr - Jastrabík, Lubomír - Dejneka, Alexandr
Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system.
[Prostorově rozlišená optická emisní spektroskopie během depozice tenkých vrstev BaxSr1-xTiO3 pomocí dvojtryskového plazma-jet systému.]
Materials Science Forum. Roč. 609, - (2009), s. 105-109. ISSN 0255-5476.
[International Conference on Thin Films and Porous Materials /1./. Algiers, 19.05.2008-22.05.2008]
R&D Projects: GA ČR GA202/08/1009; GA AV ČR KJB100100707; GA AV ČR KAN301370701; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : BaxSr1-xTiO3 * BSTO * ferroelectric films * hollow cathode * optical emission spectroscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0173768 - 6.0325016 - FZÚ 2009 RIV GB eng J - Journal Article
Tichý, M. - Hubička, Zdeněk - Šícha, Miloš - Čada, Martin - Olejníček, Jiří - Churpita, Olexandr - Jastrabík, Lubomír - Virostko, Petr - Adámek, Petr - Kudrna, Pavel - Leshkov, S. - Chichina, Mariya - Kment, Štěpán
Langmuir probe diagnostics of a plasma jet system.
[Diagnostika plazmového tryskového systému pomocí Langmuirovské sondy.]
Plasma Sources Science & Technology. Roč. 18, č. 1 (2009), 014009/1-014009/11. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA AV ČR KJB100100703; GA AV ČR KJB100100707; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : Langmuir probe * plasma jet * deposition
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 2.384, year: 2009
Permanent Link: http://hdl.handle.net/11104/0172580 - 7.0319065 - FZÚ 2009 RIV DE eng J - Journal Article
Hubička, Zdeněk - Virostko, Petr - Tichý, M. - Čada, Martin - Adámek, Petr - Olejníček, Jiří - Deyneka, Alexander - Churpita, Olexandr - Valvoda, V. - Jastrabík, Lubomír
Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system.
[Depozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody.]
Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 515-520. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA AV ČR KAN301370701; GA AV ČR KJB100100707; GA AV ČR 1QS100100563; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522
Keywords : BSTO * ferroelectric films * hollow cathode * Langmuir probe * optical emission spectroscopy * plasma jet
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.250, year: 2008
Permanent Link: http://hdl.handle.net/11104/0168325 - 8.0309887 - FZÚ 2009 RIV DE eng J - Journal Article
Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Adámek, Petr - Kment, Štěpán - Tichý, M. - Jastrabík, Lubomír
Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiOx thin films.
[Sondová diagnostika plazmového tryskového systému s efektem duté katody pro depozice tenkých vrstev TiOx.]
Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 527-533. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA AV ČR KAN301370701; GA AV ČR KJB100100707; GA MŠMT(CZ) 1M06002; GA AV ČR KAN400720701; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522; CEZ:AV0Z10100521
Keywords : hollow cathode * plasma jet * probe diagnostics * deposition of thin films
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.250, year: 2008
Permanent Link: http://hdl.handle.net/11104/0161906