Search results
- 1.0439067 - ÚPT 2017 RIV CZ cze V - Research Report
Matějka, Milan - Horáček, Miroslav - Meluzín, Petr - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír - Urbánek, Michal - Krátký, Stanislav
SMV-2014-28: Vývoj testovacích preparátů pro REM.
[SMV-2014-28: Development of test specimens for SEM.]
Brno: Tescan Brno s.r.o, 2014. 6 s.
Source of funding: N - Non-public resources
Keywords : relief structure * e-beam lithography * silicon etching * microlithography
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0242373 - 2.0437369 - ÚPT 2017 RIV CZ cze V - Research Report
Horáček, Miroslav - Kolařík, Vladimír - Matějka, Milan - Urbánek, Michal - Krátký, Stanislav - Chlumská, Jana - Meluzín, Petr - Král, Stanislav
SMV-2014-01: Reliéfní struktury na principu difraktivní optiky.
[SMV-2014-01: Relief structures based on diffractive optics.]
Brno: API Optix s.r.o, 2014. 11 s.
Source of funding: N - Non-public resources
Keywords : diffractive optical structures * relief structure * e-beam lithography
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0240926 - 3.0426282 - ÚPT 2014 RIV CZ cze V - Research Report
Urbánek, Michal
SMV-2012-19: Topografie povrchů tenkých polymerních vrstev.
[SMV-2012-19: Topography of thin polymer films.]
Brno: Univerzita Tomáše Bati ve Zlíně, 2012. 4 s.
Source of funding: N - Non-public resources
Keywords : polymers * atomic force microscopy
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0232039 - 4.0426267 - ÚPT 2017 RIV CZ cze V - Research Report
Matějka, Milan - Kolařík, Vladimír - Urbánek, Michal - Krátký, Stanislav - Chlumská, Jana - Horáček, Miroslav - Král, Stanislav
SMV-2012-12: Testovací preparát pro SEM.
[SMV-2012-12: Testing specimens for SEM.]
Brno: TESCAN ORSAY HOLDING, a.s, 2012. 5 s.
Source of funding: N - Non-public resources
Keywords : dimensional standard * e-beam lithography * e-beam microscopy * anisotropic Silicon etching
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0232003 - 5.0426249 - ÚPT 2014 RIV CZ cze V - Research Report
Horáček, Miroslav - Kolařík, Vladimír - Matějka, Milan - Urbánek, Michal - Krátký, Stanislav - Chlumská, Jana - Král, Stanislav
SMV-2013-15: Reliéfní struktury na principu diftraktivní optiky.
[SMV-2013-15: Relief structures based on diffractive optics.]
Brno: IQ Structures, s.r.o, 2013. 6 s.
Source of funding: N - Non-public resources
Keywords : diffractive optical structures * relief structures * e-beam lithography
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0231983 - 6.0426242 - ÚPT 2014 RIV CZ cze V - Research Report
Horáček, Miroslav - Kolařík, Vladimír - Matějka, Milan - Urbánek, Michal - Krátký, Stanislav - Chlumská, Jana - Král, Stanislav
SMV-2012-05: Reliéfní struktury na principu diftraktivní optiky.
[SMV-2012-05: Relief structures based on diffractive optics.]
Brno: IQ Structures, s.r.o, 2012. 6 s.
Source of funding: N - Non-public resources
Keywords : diffractive optical structures * relief structures * e-beam lithography
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0232002 - 7.0426229 - ÚPT 2014 RIV CZ cze V - Research Report
Kolařík, Vladimír - Matějka, Milan - Urbánek, Michal - Krátký, Stanislav - Chlumská, Jana - Horáček, Miroslav - Král, Stanislav
SMV-2012-01: Testovací preparát pro SEM.
[Testing specimens for SEM.]
Brno: FEI Czech Republic s.r.o, 2012. 5 s.
Source of funding: N - Non-public resources
Keywords : dimensional standard * e-beam lithography * e-beam microscopy * anisotropic Silicon etching
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0231968 - 8.0425983 - ÚPT 2014 RIV CZ cze V - Research Report
Horáček, Miroslav - Kolařík, Vladimír - Matějka, Milan - Urbánek, Michal - Krátký, Stanislav - Chlumská, Jana - Král, Stanislav
SMV-2013-01: Reliéfní struktury na principu diftraktivní optiky.
[SMV-2013-01: Relief structures based on diffractive optics.]
Brno: API Optix s.r.o, 2013. 6 s.
Source of funding: N - Non-public resources
Keywords : diffractive optical structures * relief structure * e-beam lithography
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0231762