Search results
- 1.0584778 - ÚPT 2024 CZ cze A - Abstract
Brunn, Ondřej - Knápek, Alexandr - Matějka, Milan - Krátký, Stanislav - Horáček, Miroslav - Meluzín, Petr - Chlumská, Jana - Sadílek, Jakub - Burda, Daniel - Král, Stanislav - Ondříšková, Martina - Podstránský, Jáchym - Košelová, Zuzana - Allaham, Mohammad M. - Kolařík, Vladimír
Elektronová litografie a funkční nanostruktury.
IMAPS Flash Conference. 9th International Microelectronics Assembly and Packaging Society Flash Conference. Extended abstracts. Brno: Brno University of Technology, FEEC, 2023 - (Otáhal, A.; Szendiuch, I.; Skácel, J.). s. 12-13. ISBN 978-80-214-6185-7.
[IMAPS Flash Conference 2023. International Microelectronics Assembly and Packaging Society Flash Conference /9./. 26.10.2023-27.10.2023, Brno]
Research Infrastructure: CzechNanoLab - 90110
Institutional support: RVO:68081731
OECD category: Electrical and electronic engineering
Permanent Link: https://hdl.handle.net/11104/0352625 - 2.0512151 - ÚPT 2020 JO eng A - Abstract
Matějka, Milan - Chlumská, Jana - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
Fabrication of functional nanostructures in thin silicon nitride membranes.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
Institutional support: RVO:68081731
Keywords : thin dielectric layers * silicon nitride * membranes * electron beam lithography
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302363 - 3.0512149 - ÚPT 2020 JO eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated system for optical inspection of defects in resist coated non-patterned wafer.
Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
[The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302361 - 4.0512017 - ÚPT 2020 CZ eng A - Abstract
Matějka, Milan - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
Functional nano–structuring of thin silicon nitride membranes.
5th IMAPS Flash Conference. Book of Abstracts. Brno: University of Technology, 2019. s. 74-75.
[International Microelectronics Assembly and Packaging Society Flash Conference /5./. IMAPS. 24.10.2019-25.10.2019, Brno]
Institutional support: RVO:68081731
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302234 - 5.0512002 - ÚPT 2020 CZ eng A - Abstract
Burda, Daniel - Knápek, Alexandr - Kolařík, Vladimír
On Utilizing Plasma to Produce Barrier Coatings on Cold Fieldemission Cathodes.
5th IMAPS Flash Conference. Book of Abstracts. Brno: University of Technology, 2019. s. 52-53.
[International Microelectronics Assembly and Packaging Society Flash Conference /5./. IMAPS. 24.10.2019-25.10.2019, Brno]
Institutional support: RVO:68081731
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0302227 - 6.0511777 - ÚPT 2020 eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated inspection of PMMA coating on non-patterned silicon wafers.
11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
[International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0302052 - 7.0495256 - ÚPT 2019 CZ eng A - Abstract
Horáček, Miroslav - Meluzín, Petr - Krátký, Stanislav - Matějka, Milan - Knápek, Alexandr - Kolařík, Vladimír
Spiral Arrangement: from Nanostructures to Packaging.
IMAPS Flash Conference. 4th Interrnational Microelectronics Assembly and Packaging Society Flash Conference. Book of Abstracts. Brno: University of Technbology Brno, 2018. s. 62-63. ISBN 978-80-214-5680-8.
[IMAPS Flash Conference. Interrnational Microelectronics Assembly and Packaging Society Flash Conference /4./. 25.10.2018-26.10.2018, Brno]
Institutional support: RVO:68081731
Keywords : electron beam lithography * phyllotaxis * spiral arrangement * parastichy
OECD category: Electrical and electronic engineering
Permanent Link: http://hdl.handle.net/11104/0288490 - 8.0431332 - ÚPT 2015 CZ eng A - Abstract
Kolařík, Vladimír - Krátký, Stanislav - Urbánek, Michal
PEC reliability in 3D e-beam DOE nanopatterning.
9th International Conference on Charged Particle Optics. Book of Abstracts. Brno: Institute of Scientific Instruments AS CR, v. v. i, 2014. s. 37. ISBN 978-80-87441-11-4.
[International Conference on Charged Parrticle Optics /9./. 31.08.2014-05.09.2014, Brno]
R&D Projects: GA MŠMT(CZ) LO1212; GA TA ČR TE01020233
Institutional support: RVO:68081731
Keywords : proximity effect correction * diffractive optical elements
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0236392 - 9.0429465 - ÚPT 2015 GB eng A - Abstract
Krátký, Stanislav - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Horáček, Miroslav - Chlumská, Jana - Neděla, Vilém - Jaffrezic-Renault, N. - Krejčí, J. - Kučerová, R. - Plička, R. - Krejčí, T.
Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam.
39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 387.
[MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
Institutional support: RVO:68081731
Keywords : differential conductometry biosensor * electron-beam lithography * microorganism detection
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0234577 - 10.0429463 - ÚPT 2015 GB eng A - Abstract
Urbánek, Michal - Matějka, Milan - Kolařík, Vladimír - Horáček, Miroslav - Krátký, Stanislav - Bok, Jan - Chlumská, Jana - Mikšík, P. - Vašina, J.
Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures.
39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 582.
[MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
Institutional support: RVO:68081731
Keywords : rectangular shaped beam * proximity effect simulation * binary structures and relief structures
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0234576