Search results
- 1.0324115 - FZÚ 2009 RIV CZ eng C - Conference Paper (international conference)
Hubička, Zdeněk - Virostko, Petr - Olejníček, Jiří - Deyneka, Alexander - Adámek, Petr - Valvoda, V. - Jastrabík, Lubomír - Šícha, Miloš - Tichý, M.
Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system.
[Depozice tenkých vrstev BaxSr1-xTiO3 pomocí dvoutryskového RF plazmatického systému s efektem duté katody.]
International conference on phenomena in ionized gases- ICPIG /28./. Praha: Institute of Plasma Physics AS CR, 2007 - (Schmidt, J.; Šimek, M.; Pekárek, S.; Prukner, V.), s. 765-768. ISBN 978-80-87026-01-4.
[International conference on phenomena in ionized gases - ICPIG /28./. Praha (CZ), 15.07.2007-20.07.2007]
R&D Projects: GA AV ČR KAN301370701; GA AV ČR 1QS100100563; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : BSTO * thin films * plasma deposition * hollow cathode * plasma jet
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0171898 - 2.0324107 - FZÚ 2009 RIV CZ eng C - Conference Paper (international conference)
Virostko, Petr - Hubička, Zdeněk - Kment, Štěpán - Adámek, Petr - Jastrabík, Lubomír - Tichý, M.
Electric probe diagnostics of the hollow cathode plasma jet system for TiOx thin films deposition.
[Sondové diagnostiky plazmatického tryskového systému s dutou katodou pro depozice tenkých vrstev TiOx.]
International conference on phenomena in ionized gases- ICPIG /28./. Praha: Institute of Plasma Physics AS CR, 2007 - (Schmidt, J.; Šimek, M.; Pekárek, S.; Prukner, V.), s. 783-786. ISBN 978-80-87026-01-4.
[International conference on phenomena in ionized gases - ICPIG /28./. Praha (CZ), 15.07.2007-20.07.2007]
R&D Projects: GA AV ČR KAN400720701; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522
Keywords : probe diagnostics * Langmuir probe * hollow cathode * plasma jet
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0171892 - 3.0320055 - FZÚ 2012 RIV US eng C - Conference Paper (international conference)
Jelínek, Pavel - Virostko, Petr - Hubička, Zdeněk - Bartoš, P.
Modelling of RF discharge in argon plasma.
[Model RF výboje v argonovém plazmatu.]
Proceedings of the International Conference on Computational Methods in Science and Engineering 2007 (ICCMSE 2007): Volume 2, Part B. Melville: American Institut of Physics, 2007 - (Simos, T.; Maroulis, G.), s. 1240-1243. AIP Conference Proceedings, 963. ISBN 978-0-7354-0476-2.
[International Conference on Computational Methods in Science and Engineering 2007 (ICCMSE 2007). Corfu (GR), 25.09.2007-30.09.2007]
R&D Projects: GA AV ČR KAN400720701; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522; CEZ:AV0Z10100521
Keywords : particle modelling * fluid modelling * hybrid modelling * argon plasma * RF plasma
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0005044 - 4.0308119 - FZÚ 2008 RIV US eng C - Conference Paper (international conference)
Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Adámek, Petr - Kment, Štěpán - Tichý, M. - Jastrabík, Lubomír
Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet.
[Měření iontového toku na depoziční substrát u plazmové trysky s efektem duté katody.]
Plasma 2007. Melville, New York: American Instritute of Physics, 2008 - (Hartfuss, H.; Dudeck, M.; Muslelok, J.; Sadowski, M.), s. 427-430. AIP Conference Proceedings, 993. ISBN 978-0-7354-0512-7.
[International Conference on Research and Applications of Plasmas, German-Polish Conference on Plasma Diagnostics for Fusion and Laboratory /4./ and French-Polish Seminar on Thermal Plasma in Space and Laboratory /6./. Greifswald (DE), 16.10.2007-19.10.2007]
R&D Projects: GA AV ČR KAN301370701; GA MŠMT(CZ) 1M06002; GA AV ČR KAN400720701; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522
Keywords : hollow cathode * plasma jet * ion flux * deposition of thin films
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0160694