Search results
- 1.0205670 - UPT-D 20030052 RIV US eng J - Journal Article
Zobačová, Jitka - Frank, Luděk
Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope.
Scanning. Roč. 25, č. 3 (2003), s. 150 - 156. ISSN 0161-0457. E-ISSN 1932-8745
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Keywords : nonconductive specimens * specimen charging * cathode lens
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 0.733, year: 2003
Permanent Link: http://hdl.handle.net/11104/0101283 - 2.0205641 - UPT-D 20030023 RIV US eng J - Journal Article
Mika, Filip - Ryšávka, J. - Lopour, F. - Zadražil, M. - Müllerová, Ilona - Frank, Luděk
Computer Controlled Low Energy SEM.
Microscopy and Microanalysis. Roč. 9, Sup. 3 (2003), s. 116 - 117. ISSN 1431-9276. E-ISSN 1435-8115.
[MC 2003. Dresden, 07.09.2003-12.09.2003]
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Keywords : low energy SEM * scanning electron microscope * non-conductive specimens
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.648, year: 2003
Permanent Link: http://hdl.handle.net/11104/0101254 - 3.0205568 - UPT-D 20020118 RIV NL eng J - Journal Article
Müllerová, Ilona - El-Gomati, M. - Frank, Luděk
Imaging of the boron doping in silicon using low energy SEM.
Ultramicroscopy. Roč. 93, 3/4 (2002), s. 223 - 243. ISSN 0304-3991. E-ISSN 1879-2723
R&D Projects: GA AV ČR IAA1065901; GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Keywords : electron and ion microscopes * semiconductor doping
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.772, year: 2002
Permanent Link: http://hdl.handle.net/11104/0101181 - 4.0205322 - UPT-D 20000101 RIV CZ eng J - Journal Article
Hutař, Otakar - Oral, Martin - Müllerová, Ilona - Romanovský, Vladimír
Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology.
Jemná mechanika a optika. Roč. 45, č. 10 (2000), s. 271-272. ISSN 0447-6441
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0100937 - 5.0205321 - UPT-D 20000100 RIV CZ eng J - Journal Article
Romanovský, Vladimír - Hutař, Otakar
Imaging of semiconductor structures in environmental SEM.
Jemná mechanika a optika. Roč. 45, č. 10 (2000), s. 274-275. ISSN 0447-6441
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0100936