Search results

  1. 1.
    0205595 - UPT-D 20020145 RIV CZ cze C - Conference Paper (international conference)
    Mika, Filip
    Kvantitativní studium hustoty rozložení dopantu v polovodiči pomocí emise sekundárních elektronů.
    [Quantitative study of density of the dopant configuration in a semiconductor by emission of secondary electrons.]
    Sborník prací prezentovaných na Semináři doktorandů oboru Elektronová optika konaném dne 16. 12. 2002. Brno: Ústav přístrojové techniky AV ČR, 2002 - (Müllerová, I.), s. 23 - 24. ISBN 80-238-9915-5.
    [PDS 2002. Brno (CZ), 16.12.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : semi-conductor structure * low energy SEM * contrast
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101208
     
     
  2. 2.
    0205592 - UPT-D 20020142 RIV CZ cze C - Conference Paper (international conference)
    Hrnčiřík, Petr
    Rastrovací elektronová mikroskopie pomalými a Augerovými elektrony.
    [Scanning electron microscopy by slow and Auger electrons.]
    Sborník prací prezentovaných na Semináři doktorandů oboru Elektronová optika konaném dne 16. 12. 2002. Brno: Ústav přístrojové techniky AV ČR, 2002 - (Müllerová, I.), s. 15 - 17. ISBN 80-238-9915-5.
    [PDS 2002. Brno (CZ), 16.12.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : Auger spectroscopy * microscopy with slow electrons * computer simulations
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101205
     
     
  3. 3.
    0205589 - UPT-D 20020139 RIV CZ cze C - Conference Paper (international conference)
    Čižmár, Petr
    Elektronová spektro-mikroskopie s mnohakanálovou detekcí signálu.
    [Secondary electron contrast of doped regions in semiconductor.]
    Sborník prací prezentovaných na Semináři doktorandů oboru Elektronová optika konaném dne 16. 12. 2002. Brno: Ústav přístrojové techniky AV ČR, 2002 - (Müllerová, I.), s. 7 - 10. ISBN 80-238-9915-5.
    [PDS 2002. Brno (CZ), 16.12.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : energy * spectroscopy * parallel
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101202
     
     
  4. 4.
    0205552 - UPT-D 20020102 RIV ZA eng C - Conference Paper (international conference)
    Frank, Luděk - Müllerová, Ilona - El-Gomati, M.
    SEM visualization of doping in semiconductors.
    Proceedings of 15th international congress on electron microscopy. Durban: Microscopy society of Southern Africa, 2002 - (Engelbrecht, J.; Sewell, T.; Witcomb, M.; Cross, R.; Richards, P.), s. 39 - 40. ISBN 0-620-29294-6.
    [ICEM. Durban (ZA), 01.09.2002-06.09.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : dopant concentration * image contrast * secondary electron
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101165
     
     
  5. 5.
    0205545 - UPT-D 20020095 RIV JP eng C - Conference Paper (international conference)
    Frank, Luděk - Müllerová, Ilona - El-Gomati, M. - Jayakody, H.
    SEM acquired electronic contrast of doped areas in semiconductors and its interpretation.
    Proceedings of seminar on nanotechnology for fabrication of hybrid materials. Toyama: JPJSMA, 2002, s. 9 - 12.
    [Japanese-polish joint seminar on materials analysis. Toyama (JP), 06.11.2002-08.11.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : secondary electrons * electronic contrast * semiconductors
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101158
     
     
  6. 6.
    0205505 - UPT-D 20020055 RIV CZ eng C - Conference Paper (international conference)
    Müllerová, Ilona - Frank, Luděk
    An ultrahigh vacuum scanning low energy electron microscope for surface studies.
    Proceedings of the 8th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 35 - 36. ISBN 80-238-8986-9.
    [Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : low energy electrons * ultrahigh vacuum * scanning primary beam
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101118
     
     
  7. 7.
    0205503 - UPT-D 20020053 RIV CZ eng C - Conference Paper (international conference)
    Frank, Luděk - Müllerová, Ilona - El-Gomati, M.
    Secondary electron contrast of dopped regions in semiconductor - a matter of surface treatment?
    Proceedings of the 8th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 25 - 26. ISBN 80-238-8986-9.
    [Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : semiconductor technology * lower energies * multilayers
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101116
     
     
  8. 8.
    0205494 - UPT-D 20020044 RIV ZA eng C - Conference Paper (international conference)
    Müllerová, Ilona - Frank, Luděk
    Practical resolution limit in the scanning low energy electron microscope.
    Proceedings of 15th international congress on electron microscopy. Durban: Microscopy society of Southern Africa, 2002 - (Engelbrecht, J.; Sewell, T.; Witcomb, M.; Cross, R.; Richards, P.), s. 99 - 100. ISBN 0-620-29294-6.
    [ICEM. Durban (ZA), 01.09.2002-06.09.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : low-energy SEM * scanning electron microscopy
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101107
     
     
  9. 9.
    0205487 - UPT-D 20020037 RIV CZ eng C - Conference Paper (international conference)
    Müllerová, Ilona - Frank, Luděk
    Ultrahigh vacuum scanning low energy electron microscope (UHV SLEEM) for surface studies.
    Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society. Brno: CSMS, 2002 - (Frank, L.), s. 79 - 82. ISBN 80-238-8749-1.
    [CSEM. Vranovská Ves (CZ), 08.02.2002-09.02.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : UHV SLEEM
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101100
     
     
  10. 10.
    0205483 - UPT-D 20020033 RIV CZ eng C - Conference Paper (international conference)
    Frank, Luděk - Müllerová, Ilona
    Examination of semiconductor structures with slow electrons.
    Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society. Brno: CSMS, 2002 - (Frank, L.), s. 19 - 22. ISBN 80-238-8749-1.
    [CSEM. Vranovská Ves (CZ), 08.02.2002-09.02.2002]
    R&D Projects: GA AV ČR IAA1065901
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : slow electrons * cathode lens equipped SEM
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0101096
     
     

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