Search results
- 1.0205595 - UPT-D 20020145 RIV CZ cze C - Conference Paper (international conference)
Mika, Filip
Kvantitativní studium hustoty rozložení dopantu v polovodiči pomocí emise sekundárních elektronů.
[Quantitative study of density of the dopant configuration in a semiconductor by emission of secondary electrons.]
Sborník prací prezentovaných na Semináři doktorandů oboru Elektronová optika konaném dne 16. 12. 2002. Brno: Ústav přístrojové techniky AV ČR, 2002 - (Müllerová, I.), s. 23 - 24. ISBN 80-238-9915-5.
[PDS 2002. Brno (CZ), 16.12.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : semi-conductor structure * low energy SEM * contrast
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101208 - 2.0205592 - UPT-D 20020142 RIV CZ cze C - Conference Paper (international conference)
Hrnčiřík, Petr
Rastrovací elektronová mikroskopie pomalými a Augerovými elektrony.
[Scanning electron microscopy by slow and Auger electrons.]
Sborník prací prezentovaných na Semináři doktorandů oboru Elektronová optika konaném dne 16. 12. 2002. Brno: Ústav přístrojové techniky AV ČR, 2002 - (Müllerová, I.), s. 15 - 17. ISBN 80-238-9915-5.
[PDS 2002. Brno (CZ), 16.12.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : Auger spectroscopy * microscopy with slow electrons * computer simulations
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101205 - 3.0205589 - UPT-D 20020139 RIV CZ cze C - Conference Paper (international conference)
Čižmár, Petr
Elektronová spektro-mikroskopie s mnohakanálovou detekcí signálu.
[Secondary electron contrast of doped regions in semiconductor.]
Sborník prací prezentovaných na Semináři doktorandů oboru Elektronová optika konaném dne 16. 12. 2002. Brno: Ústav přístrojové techniky AV ČR, 2002 - (Müllerová, I.), s. 7 - 10. ISBN 80-238-9915-5.
[PDS 2002. Brno (CZ), 16.12.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : energy * spectroscopy * parallel
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101202 - 4.0205552 - UPT-D 20020102 RIV ZA eng C - Conference Paper (international conference)
Frank, Luděk - Müllerová, Ilona - El-Gomati, M.
SEM visualization of doping in semiconductors.
Proceedings of 15th international congress on electron microscopy. Durban: Microscopy society of Southern Africa, 2002 - (Engelbrecht, J.; Sewell, T.; Witcomb, M.; Cross, R.; Richards, P.), s. 39 - 40. ISBN 0-620-29294-6.
[ICEM. Durban (ZA), 01.09.2002-06.09.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : dopant concentration * image contrast * secondary electron
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101165 - 5.0205545 - UPT-D 20020095 RIV JP eng C - Conference Paper (international conference)
Frank, Luděk - Müllerová, Ilona - El-Gomati, M. - Jayakody, H.
SEM acquired electronic contrast of doped areas in semiconductors and its interpretation.
Proceedings of seminar on nanotechnology for fabrication of hybrid materials. Toyama: JPJSMA, 2002, s. 9 - 12.
[Japanese-polish joint seminar on materials analysis. Toyama (JP), 06.11.2002-08.11.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : secondary electrons * electronic contrast * semiconductors
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101158 - 6.0205505 - UPT-D 20020055 RIV CZ eng C - Conference Paper (international conference)
Müllerová, Ilona - Frank, Luděk
An ultrahigh vacuum scanning low energy electron microscope for surface studies.
Proceedings of the 8th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 35 - 36. ISBN 80-238-8986-9.
[Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : low energy electrons * ultrahigh vacuum * scanning primary beam
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101118 - 7.0205503 - UPT-D 20020053 RIV CZ eng C - Conference Paper (international conference)
Frank, Luděk - Müllerová, Ilona - El-Gomati, M.
Secondary electron contrast of dopped regions in semiconductor - a matter of surface treatment?
Proceedings of the 8th international seminar, held in Skalský dvůr. Brno: Ústav přístrojové techniky Akademie věd České republiky, 2002 - (Frank, L.), s. 25 - 26. ISBN 80-238-8986-9.
[Recent trends in charged particle optics and surface physics instrumentation. Skalský dvůr (CZ), 08.07.2002-12.07.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : semiconductor technology * lower energies * multilayers
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101116 - 8.0205494 - UPT-D 20020044 RIV ZA eng C - Conference Paper (international conference)
Müllerová, Ilona - Frank, Luděk
Practical resolution limit in the scanning low energy electron microscope.
Proceedings of 15th international congress on electron microscopy. Durban: Microscopy society of Southern Africa, 2002 - (Engelbrecht, J.; Sewell, T.; Witcomb, M.; Cross, R.; Richards, P.), s. 99 - 100. ISBN 0-620-29294-6.
[ICEM. Durban (ZA), 01.09.2002-06.09.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : low-energy SEM * scanning electron microscopy
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101107 - 9.0205487 - UPT-D 20020037 RIV CZ eng C - Conference Paper (international conference)
Müllerová, Ilona - Frank, Luděk
Ultrahigh vacuum scanning low energy electron microscope (UHV SLEEM) for surface studies.
Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society. Brno: CSMS, 2002 - (Frank, L.), s. 79 - 82. ISBN 80-238-8749-1.
[CSEM. Vranovská Ves (CZ), 08.02.2002-09.02.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : UHV SLEEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101100 - 10.0205483 - UPT-D 20020033 RIV CZ eng C - Conference Paper (international conference)
Frank, Luděk - Müllerová, Ilona
Examination of semiconductor structures with slow electrons.
Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society. Brno: CSMS, 2002 - (Frank, L.), s. 19 - 22. ISBN 80-238-8749-1.
[CSEM. Vranovská Ves (CZ), 08.02.2002-09.02.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : slow electrons * cathode lens equipped SEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0101096