Search results
- 1.0477676 - FZÚ 2018 RIV GB eng J - Journal Article
Pokorný, Petr - Musil, Jindřich - Lančok, Ján - Fitl, Přemysl - Novotný, Michal - Bulíř, Jiří - Vlček, Jan
Mass spectrometry investigation of magnetron sputtering discharges.
Vacuum. Roč. 143, č. 6 (2017), s. 438-443. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA MŠMT LO1409; GA MŠMT LM2015088; GA TA ČR(CZ) TA03010490; GA ČR GA17-13427S
Institutional support: RVO:68378271
Keywords : mass spectrometry * atoms * radicals and ions * RF discharge * contamination * metallic films
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 2.067, year: 2017
Permanent Link: http://hdl.handle.net/11104/0273958