Search results
- 1.0436454 - FZÚ 2015 FR eng A - Abstract
Savchenko, Dariia - Kulikovsky, V. - Vorlíček, Vladimír - Lančok, Ján - Kalabukhova, E.
Optical and EPR study of a-SiCxNy films obtained by magnetron sputtering.
E-MRS 2014 Spring Meeting. Lille: European Materials Research Society, 2014 - (Lippert, T.). G.XI. 5
[E-MRS 2014 Spring Meeting. 26.05.2014-30.05.2014, Lille]
R&D Projects: GA MŠMT(CZ) LM2011029; GA ČR GP13-06697P
Grant - others:SAFMAT(XE) CZ.2.16/3.1.00/22132
Institutional support: RVO:68378271
Keywords : silicon carbonitride films * carbon dangling bonds * EPR * interface defects
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0240199