Search results
- 1.0450607 - FZÚ 2016 RIV CH eng C - Conference Paper (international conference)
Kleiner, A. - Suchaneck, G. - Dejneka, Alexandr - Jastrabík, Lubomír - Lavrentiev, V. - Kiselev, D.A. - Gerlach, G.
Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates.
Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230. Pfaffikon: Scientific.Net, 2015 - (Ubizskii, S.; Vasylechko, L.; Zhydachevskii, Y.), s. 3-7. Solid State Phenomena, 230. ISBN 978-3-03835-428-4. ISSN 1662-9779.
[Oxide Materials for Electronic Engineering – Fabrication, Properties and Applications (ОМЕЕ 2014). Lviv (UA), 26.05.2014-30.05.2014]
Institutional support: RVO:68378271
Keywords : complex oxide film deposition * PZT * multitarget reactive magnetron sputtering * flexible polymer substrate * XPS * PFM
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0251878 - 2.0391185 - FZÚ 2013 RIV US eng C - Conference Paper (international conference)
Kleiner, A. - Suchaneck, G. - Adolphi, B. - Gerlach, G. - Lavrentiev, V. - Hubička, Zdeněk - Čada, Martin - Jastrabík, Lubomír - Dejneka, Alexandr
Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates.
2012 International Symposium on Applications of Ferroelectrics held jointly with 11th IEEE ECAPD and IEEE PFM (ISAF/ECAPD/PFM). New York: IEEE - Institute of Electrical and Electronics Engineers, 2012, s. 1-3. IEEE International Symposium on Applications of Ferroelecs. ISBN 978-1-4673-2669-8. ISSN 1099-4734.
[IEEE International Symposium on Applications of Ferroelectrics held jointly with 11th ECAPD and 4th PFM /21./. Aveiro (PT), 09.07.2012-13.07.2012]
Institutional research plan: CEZ:AV0Z10100522
Keywords : PZT * thin film * polymer substrate * XPS * RBS
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0220073